Active wafer probe

United States of America Patent

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Jul 20, 2010
Grant Date
Dec 18, 2008
app pub date
Aug 14, 2008
filing date
Dec 24, 2003

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Expired

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Abstract

A probe suitable for probing a semiconductor wafer that includes an active circuit. The probe may include a flexible interconnection between the active circuit and a support structure. The probe may impose a relatively low capacitance on the device under test.

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Patent Owner(s)

Patent Owner	Address
CASCADE MICROTECH INC	2430 NW 206TH AVENUE BEAVERTON OR 97006

International Classification(s)

G01R:MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC V....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Gleason, K Reed	Portland, US	49	1851
Strid, Eric	Portland, US	12	121

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Active wafer probe

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12228812

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PATENT NO	7759953
APP PUB NO	20080309358A1
SERIAL NO	12228812
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
July 20, 2010	US,7759953,B2 US7759953B2	GRANTED PATENT AS SECOND PUBLICATION
December 18, 2008	US,20080309358,A1 US20080309358A1	FIRST PUBLISHED PATENT APPLICATION

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12228812

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