Active wafer probe

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7759953
APP PUB NO 20080309358A1
SERIAL NO

12228812

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A probe suitable for probing a semiconductor wafer that includes an active circuit. The probe may include a flexible interconnection between the active circuit and a support structure. The probe may impose a relatively low capacitance on the device under test.

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Patent Owner(s)

  • CASCADE MICROTECH, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gleason, K Reed Portland, US 49 1829
Strid, Eric Portland, US 12 114

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