US Patent No: 7,761,986

Number of patents in Portfolio can not be more than 2000

Membrane probing method using improved contact

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Abstract

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A method of probing an electrical device using a membrane probing system having an improved contact. A membrane probe forms a contact having a ridge with a pair of inclined surfaces defining an acute angle such that, when pressed into an electrical pad of a device to be tested, the ridge penetrates into the electrical pad, shearing away any oxide on the surface of the pad. The device may then be tested.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CASCADE MICROTECH, INC.BEAVERTON, OR139

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bayne, Michael A Vancouver, US 17 237
Gleason, Reed Portland, US 17 250
Koxxy, Martin Hillsboro, US 11 142
Lesher, Timothy Beaverton, US 15 226
Smith, Kenneth Portland, US 97 1009

Cited Art Landscape

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7,020,360 Wavelength dispersion probing system 94 2002
6,937,040 Probe module and a testing apparatus 61 2004
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (3)
6,927,079 Method for probing a semiconductor wafer 105 2000
6,605,951 Interconnector and method of connecting probes to a die for functional analysis 108 2000
7,023,225 Wafer-mounted micro-probing platform 94 2003
 
NEC ELECTRONICS CORPORATION (1)
6,320,396 Parasitic MIM structural spot analysis method for semiconductor device and parasitic MIM structure spot analysis method for silicon semiconductor device 99 1997
 
PINNACLE PRODUCTS, INC. (1)
5,807,107 Dental infection control system 94 1996
 
Technoprobe S.r.l. (1)
2002/0070,743 Testing head having vertical probes 96 2001
 
NOVELLUS DEVELOPMENT COMPANY, LLC (1)
6,946,859 Probe structures using clamped substrates with compliant interconnectors 48 2003
 
THERMOCARBON, INC. (1)
5,676,360 Machine tool rotary table locking apparatus 116 1995
 
ANRITSU COMPANY (4)
5,905,421 Apparatus for measuring and/or injecting high frequency signals in integrated systems 80 1997
6,169,410 Wafer probe with built in RF frequency conversion module 85 1998
6,529,844 Vector network measurement system 116 1999
6,943,563 Probe tone S-parameter measurements 58 2002
 
MOLECULAR DEVICES, INC. (1)
5,164,319 Multiple chemically modulated capacitance determination 324 1989
 
Data Probe Corporation (1)
4,588,950 Test system for VLSI digital circuit and method of testing 97 1983
 
MicroCraft (1)
7,188,037 Method and apparatus for testing circuit boards 84 2004
 
YAMAICHI ELECTRONICS CO., LTD. (1)
6,946,375 Manufacture of probe unit having lead probes extending beyond edge of substrate 35 2002
 
BECHTEL BWXT IDAHO, LLC (1)
6,147,502 Method and apparatus for measuring butterfat and protein content using microwave absorption techniques 80 1998
 
KAI Technologies, Inc. (1)
6,275,738 Microwave devices for medical hyperthermia, thermotherapy and diagnosis 143 1999
 
Research Organization for Circuit Knowledge (1)
5,584,120 Method of manufacturing printed circuits 79 1994
 
FLUKE CORPORATION (1)
6,384,614 Single tip Kelvin probe 103 2000
 
Junkosha Co., Ltd. (1)
4,567,321 Flexible flat cable 102 1984
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (2)
5,794,133 Microwave mixing circuit 84 1996
6,806,836 Helical antenna apparatus provided with two helical antenna elements, and radio communication apparatus provided with same helical antenna apparatus 75 2003
 
ATMEL CORPORATION (1)
4,649,339 Integrated circuit interface 115 1984
 
INTEGRATED TECHNOLOGY CORPORATION (1)
6,118,894 Integrated circuit probe card inspection system 118 1997
 
UNIVERSITY OF WALES, ABERYSTWYTH (1)
5,569,591 Analytical or monitoring apparatus and method 153 1994
 
SOLID STATE MEASUREMENTS, INC. (2)
6,900,652 Flexible membrane probe and method of use thereof 106 2003
7,023,231 Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof 94 2004
 
Solid State Farms, Inc. (1)
5,792,668 Radio frequency spectral analysis for in-vitro or in-vivo environments 212 1996
 
SONY CORPORATION (2)
6,362,792 Antenna apparatus and portable radio set 78 2000
6,366,247 Antenna device and portable radio set 83 2000
 
New Wave Research (3)
5,811,751 Multi-wavelength laser system, probe station and laser cutter system using the same 141 1997
6,573,702 Method and apparatus for cleaning electronic test contacts 103 1997
5,963,364 Multi-wavelength variable attenuator and half wave plate 120 1997
 
Spectroscopy Imaging Systems Corporation (1)
4,916,398 Efficient remote transmission line probe tuning for NMR apparatus 95 1988
 
WENTWORTH LABORATORIES, INC. (4)
4,975,638 Test probe assembly for testing integrated circuit devices 153 1989
5,355,079 Probe assembly for testing integrated circuit devices 107 1993
5,959,461 Probe station adapter for backside emission inspection 123 1997
6,031,383 Probe station for low current, low voltage parametric measurements using multiple probes 107 1998
 
FormFactor, Inc. (152)
5,476,211 Method of manufacturing electrical contacts, using a sacrificial member 375 1993
5,917,707 Flexible contact structure with an electrically conductive shell 314 1994
6,049,976 Method of mounting free-standing resilient electrical contact structures to electronic components 124 1995
5,772,451 Sockets for electronic components and methods of connecting to electronic components 403 1995
5,974,662 Method of planarizing tips of probe elements of a probe card assembly 370 1995
5,829,128 Method of mounting resilient contact structures to semiconductor devices 235 1995
5,601,740 Method and apparatus for wirebonding, for severing bond wires, and for forming balls on the ends of bond wires 116 1995
5,820,014 Solder preforms 125 1996
5,773,780 Method of severing bond wires and forming balls at their ends 77 1996
5,900,738 Contact structure device for interconnections, interposer, semiconductor assembly and package using the same and method 149 1996
5,926,951 Method of stacking electronic components 177 1996
6,184,587 Resilient contact structures, electronic interconnection component, and method of mounting resilient contact structures to electronic components 124 1996
6,242,803 Semiconductor devices with integral contact structures 94 1996
6,274,823 Interconnection substrates with resilient contact structures on both sides 127 1996
6,476,333 Raised contact structures (solder columns) 73 1996
6,064,213 Wafer-level burn-in and test 264 1997
5,806,181 Contact carriers (tiles) for populating larger substrates with spring contacts 278 1997
5,994,152 Fabricating interconnects and tips using sacrificial substrates 230 1997
6,442,831 Method for shaping spring elements 74 1997
6,482,013 Microelectronic spring contact element and electronic component having a plurality of spring contact elements 157 1997
5,832,601 Method of making temporary connections between electronic components 201 1997
5,864,946 Method of making contact tip structures 173 1997
5,878,486 Method of burning-in semiconductor devices 110 1997
5,884,398 Mounting spring elements on semiconductor devices 106 1997
5,983,493 Method of temporarily, then permanently, connecting to a semiconductor device 120 1997
5,998,228 Method of testing semiconductor 130 1997
6,032,356 Wafer-level test and burn-in, and semiconductor process 163 1997
6,184,053 Method of making microelectronic spring contact elements 203 1997
5,912,046 Method and apparatus for applying a layer of flowable coating material to a surface of an electronic component 81 1997
5,998,864 Stacking semiconductor devices, particularly memory chips 206 1997
6,050,829 Making discrete power connections to a space transformer of a probe card assembly 160 1997
6,307,161 Partially-overcoated elongate contact structures 73 1997
6,043,563 Electronic components with terminals and spring contact elements extending from areas which are remote from the terminals 167 1997
6,741,085 Contact carriers (tiles) for populating larger substrates with spring contacts 94 1997
6,520,778 Microelectronic contact structures, and methods of making same 155 1998
6,720,501 PC board having clustered blind vias 71 1998
6,042,712 Apparatus for controlling plating over a face of a substrate 117 1998
6,090,261 Method and apparatus for controlling plating over a face of a substrate 84 1998
6,110,823 Method of modifying the thickness of a plating on a member by creating a temperature gradient on the member, applications for employing such a method, and structures resulting from such a method 187 1998
6,023,103 Chip-scale carrier for semiconductor devices including mounted spring contacts 159 1998
6,033,935 Sockets for "springed" semiconductor devices 110 1998
6,669,489 Interposer, socket and assembly for socketing an electronic component and method of making and using same 115 1998
6,330,164 Interconnect assemblies and methods including ancillary electronic component connected in immediate proximity of semiconductor device 127 1998
6,029,344 Composite interconnection element for microelectronic components, and method of making same 217 1998
6,246,247 Probe card assembly and kit, and methods of using same 127 1998
6,441,315 Contact structures with blades having a wiping motion 126 1998
6,690,185 Large contactor with multiple, aligned contactor units 139 1998
6,255,126 Lithographic contact elements 224 1998
6,268,015 Method of making and using lithographic contact springs 127 1998
6,150,186 Method of making a product with improved material properties by moderate heat-treatment of a metal incorporating a dilute additive 102 1998
6,429,029 Concurrent design and subsequent partitioning of product and test die 163 1998
6,456,099 Special contact points for accessing internal circuitry of an integrated circuit 118 1998
6,551,844 Test assembly including a test die for testing a semiconductor product die 51 1998
6,215,670 Method for manufacturing raised electrical contact pattern of controlled geometry 126 1999
6,208,225 Filter structures for integrated circuit interfaces 156 1999
6,218,910 High bandwidth passive integrated circuit tester probe card assembly 142 1999
6,448,865 Integrated circuit interconnect system 74 1999
6,452,411 Efficient parallel testing of integrated circuit devices using a known good device to generate expected responses 109 1999
6,480,978 Parallel testing of integrated circuit devices using cross-DUT and within-DUT comparisons 85 1999
6,499,121 Distributed interface for parallel testing of multiple devices using a single tester channel 98 1999
6,627,483 Method for mounting an electronic component 100 1999
6,644,982 Method and apparatus for the transport and tracking of an electronic component 120 1999
6,887,723 Method for processing an integrated circuit including placing dice into a carrier and testing 75 1999
6,468,098 Electrical contactor especially wafer level contactor using fluid pressure 98 1999
6,655,023 Method and apparatus for burning-in semiconductor devices in wafer form 84 1999
6,827,584 Interconnect for microelectronic structures with enhanced spring characteristics 93 1999
6,491,968 Methods for making spring interconnect structures 102 1999
6,672,875 Spring interconnect structures 111 1999
6,339,338 Apparatus for reducing power supply noise in an integrated circuit 91 2000
6,168,974 Process of mounting spring contacts to semiconductor devices 114 2000
6,459,343 Integrated circuit interconnect system forming a multi-pole filter 71 2000
6,232,149 Sockets for "springed" semiconductor devices 79 2000
6,509,751 Planarizer for a semiconductor contactor 142 2000
6,215,196 Electronic component with terminals and spring contact elements extending from areas which are remote from the terminals 72 2000
6,640,432 Method of fabricating shaped springs 105 2000
6,677,744 System for measuring signal path resistance for an integrated circuit tester interconnect structure 71 2000
6,476,630 Method for testing signal paths between an integrated circuit wafer and a wafer tester 75 2000
6,525,555 Wafer-level burn-in and test 102 2000
6,727,579 ELECTRICAL CONTACT STRUCTURES FORMED BY CONFIGURING A FLEXIBLE WIRE TO HAVE A SPRINGABLE SHAPE AND OVERCOATING THE WIRE WITH AT LEAST ONE LAYER OF A RESILIENT CONDUCTIVE MATERIAL, METHODS OF MOUNTING THE CONTACT STRUCTURES TO ELECTRONIC COMPONENTS, AND APPLICATIONS FOR EMPLOYING THE CONTACT STRUCTURES 102 2000
6,685,817 Method and apparatus for controlling plating over a face of a substrate 65 2000
6,622,103 System for calibrating timing of an integrated circuit wafer tester 93 2000
6,603,323 Closed-grid bus architecture for wafer interconnect structure 90 2000
6,727,580 Microelectronic spring contact elements 79 2000
6,539,531 Method of designing, fabricating, testing and interconnecting an IC to external circuit nodes 118 2000
6,835,898 ELECTRICAL CONTACT STRUCTURES FORMED BY CONFIGURING A FLEXIBLE WIRE TO HAVE A SPRINGABLE SHAPE AND OVERCOATING THE WIRE WITH AT LEAST ONE LAYER OF A RESILIENT CONDUCTIVE MATERIAL, METHODS OF MOUNTING THE CONTACT STRUCTURES TO ELECTRONIC COMPONENTS, AND APPLICATIONS FOR EMPLOYING THE CONTACT STRUCTURES 85 2000
6,778,406 Resilient contact structures for interconnecting electronic devices 126 2000
6,475,822 Method of making microelectronic contact structures 91 2000
6,597,187 Special contact points for accessing internal circuitry of an integrated circuit 76 2000
6,603,324 Special contact points for accessing internal circuitry of an integrated circuit 72 2000
6,606,575 Cross-correlation timing calibration for wafer-level IC tester interconnect systems 85 2000
6,621,260 Special contact points for accessing internal circuitry of an integrated circuit 80 2000
6,701,612 Method and apparatus for shaping spring elements 89 2000
6,713,374 Interconnect assemblies and methods 103 2000
6,836,962 Method and apparatus for shaping spring elements 78 2000
6,538,538 High frequency printed circuit board via 90 2001
6,791,176 Lithographic contact elements 79 2001
6,616,966 Method of making lithographic contact springs 127 2001
6,780,001 Forming tool for forming a contoured microelectronic spring mold 75 2001
6,501,343 Integrated circuit tester with high bandwidth probe assembly 94 2001
6,606,014 Filter structures for integrated circuit interfaces 63 2001
6,534,856 Sockets for "springed" semiconductor devices 90 2001
6,910,268 Method for fabricating an IC interconnect system including an in-street integrated circuit wafer via 139 2001
6,856,150 Probe card with coplanar daughter card 86 2001
6,627,980 Stacked semiconductor device assembly with microelectronic spring contacts 82 2001
6,538,214 Method for manufacturing raised electrical contact pattern of controlled geometry 78 2001
6,882,239 Electromagnetically coupled interconnect system 89 2001
6,888,362 Test head assembly for electronic components with plurality of contoured microelectronic spring contacts 97 2001
6,729,019 Method of manufacturing a probe card 110 2001
6,678,876 Process and apparatus for finding paths through a routing space 91 2001
6,862,727 Process and apparatus for adjusting traces 67 2001
6,764,869 Method of assembling and testing an electronics module 71 2001
6,714,828 Method and system for designing a probe card 74 2001
6,882,546 Multiple die interconnect system 75 2001
6,664,628 Electronic component overlapping dice of unsingulated semiconductor wafer 70 2001
6,456,103 Apparatus for reducing power supply noise in an integrated circuit 89 2001
6,759,311 Fan out of interconnect elements attached to semiconductor wafer 71 2001
6,817,052 Apparatuses and methods for cleaning test probes 91 2001
6,816,031 Adjustable delay transmission line 73 2001
6,624,648 Probe card assembly 120 2001
6,777,319 Microelectronic spring contact repair 81 2001
6,479,308 Semiconductor fuse covering 70 2001
6,615,485 Probe card assembly and kit, and methods of making same 96 2001
6,891,385 Probe card cooling assembly with direct cooling of active electronic components 94 2001
7,002,363 Method and system for compensating thermally induced motion of probe cards 120 2001
6,741,092 Method and system for detecting an arc condition 63 2001
6,864,105 Method of manufacturing a probe card 70 2002
6,680,659 Integrated circuit interconnect system 73 2002
6,784,674 Test signal distribution system for IC tester 76 2002
6,798,225 Tester channel to multiple IC terminals 80 2002
6,825,422 Interconnection element with contact blade 83 2002
6,812,691 Compensation for test signal degradation due to DUT fault 70 2002
6,640,415 Segmented contactor 110 2002
6,657,455 Predictive, adaptive power supply for an integrated circuit under test 82 2002
6,807,734 Microelectronic contact structures, and methods of making same 79 2002
6,559,671 Efficient parallel testing of semiconductor devices using a known good device to generate expected responses 75 2002
6,646,520 Integrated circuit interconnect system 75 2002
6,839,964 Method for manufacturing a multi-layer printed circuit board 68 2002
6,686,754 Integrated circuit tester with high bandwidth probe assembly 75 2002
6,678,850 Distributed interface for parallel testing of multiple devices using a single tester channel 74 2002
6,818,840 Method for manufacturing raised electrical contact pattern of controlled geometry 68 2002
6,642,625 Sockets for "springed" semiconductor devices 66 2002
6,661,316 High frequency printed circuit board via 71 2002
6,825,052 Test assembly including a test die for testing a semiconductor product die 85 2002
6,788,094 Wafer-level burn-in and test 78 2002
6,845,491 Method of designing, fabricating, testing and interconnecting an IC to external circuit nodes 73 2003
6,784,677 Closed-grid bus architecture for wafer interconnect structure 66 2003
6,911,835 High performance probe system 85 2003
6,870,381 Insulative covering of probe tips 64 2003
6,911,814 Apparatus and method for electromechanical testing and validation of probe cards 75 2003
6,913,468 Methods of removably mounting electronic components to a circuit board, and sockets formed by the methods 91 2003
6,822,529 Integrated circuit interconnect system 72 2003
6,917,210 Integrated circuit tester with high bandwidth probe assembly 69 2003
 
SAMSUNG ELECTRONICS CO., LTD. (4)
6,970,001 Variable impedance test probe 74 2003
6,937,039 Tip and tip assembly for a signal probe 22 2003
6,900,653 Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof 106 2003
6,909,297 Probe card 56 2004
 
SONY ELECTRONICS INC. (2)
5,669,316 Turntable for rotating a wafer carrier 101 1993
2007/0024,506 Systems and methods for high frequency parallel transmissions 79 2006
 
WISCONSIN ALUMNI RESEARCH FOUNDATION (1)
2003/0088,180 Space-time microwave imaging for cancer detection 114 2002
 
Semitest, Inc. (1)
4,891,584 Apparatus for making surface photovoltage measurements of a semiconductor 138 1988
 
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM (1)
2003/0119,057 Forming and modifying dielectrically-engineered microparticles 135 2001
 
SLOAN TECHNOLOGY CORPORATION, A CORP. OF CA (1)
4,707,657 Connector assembly for a circuit board testing machine, a circuit board testing machine, and a method of testing a circuit board by means of a circuit board testing machine 150 1985
 
Albany Instruments, Inc. (1)
6,933,717 Sensors and probes for mapping electromagnetic fields 61 2004
 
Formfactor, et al. (1)
6,937,037 Probe card assembly for contacting a device with raised contact elements 65 2002
 
RENESAS ELECTRONICS CORPORATION (4)
6,028,435 Semiconductor device evaluation system using optical fiber 108 1997
6,160,407 Inspection method and wiring current observation method for semiconductor device and apparatus of the same 98 1998
6,900,646 Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof 97 2002
6,551,884 Semiconductor device including gate insulation films having different thicknesses 71 2002
 
KABUSHIKI KAISHA NIHON MICRONICS (2)
5,888,075 Auxiliary apparatus for testing device 78 1997
6,019,612 Electrical connecting apparatus for electrically connecting a device to be tested 87 1998
 
DIT-MCO INTERNATIONAL CORPORATION (1)
4,357,575 Apparatus for use in testing printed circuit process boards having means for positioning such boards in proper juxtaposition with electrical contacting assemblies 116 1980
 
MCC GESELLSCHAFT FUR DIAGNOSESYSTEME IN MEDIZIN UND TECHNIK MBH & CO. KG (1)
2005/0168,722 Device and method for measuring constituents in blood 41 2003
 
OPTOMETRIX, INC. (1)
6,181,416 Schlieren method for imaging semiconductor device properties 84 1999
 
FRESH QUEST CORPORATION (1)
5,589,781 Die carrier apparatus 74 1993
 
SEMICONDUCTOR PHYSICS LABORATORY, INC. (1)
6,052,653 Spreading resistance profiling system 100 1997
 
TERADYNE, INC. (1)
6,784,679 Differential coaxial contact array for high-density, high-speed signals 93 2002
 
GLOBALFOUNDRIES INC. (21)
5,441,690 Process of making pinless connector 75 1993
5,810,607 Interconnector with contact pads having enhanced durability 182 1995
5,785,538 High density test probe with rigid surface structure 107 1996
6,268,016 Manufacturing computer systems with fine line circuitized substrates 68 1996
6,286,208 Interconnector with contact pads having enhanced durability 86 1996
6,054,651 Foamed elastomers for wafer probing applications and interposer connectors 82 1996
6,091,255 System and method for tasking processing modules based upon temperature 135 1998
6,062,879 High density test probe with rigid surface structure 110 1998
6,332,270 Method of making high density integral test probe 129 1998
6,608,494 Single point high resolution time resolved photoemission microscopy system and method 111 1998
6,452,406 Probe structure having a plurality of discrete insulated probe tips 82 1999
6,528,984 Integrated compliant probe for wafer level test and burn-in 115 1999
6,483,327 Quadrant avalanche photodiode time-resolved detection 109 1999
6,724,928 Real-time photoemission detection system 97 2000
6,488,405 Flip chip defect analysis using liquid crystal 102 2000
6,526,655 Angled flying lead wire bonding process 104 2001
6,617,862 Laser intrusive technique for locating specific integrated circuit current paths 98 2002
6,788,093 Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies 107 2002
7,022,976 Dynamically adjustable probe tips 98 2003
7,011,531 Membrane probe with anchored elements 93 2005
7,005,879 Device for probe card power bus noise reduction 93 2005
 
NISSAN CHEMICAL INDUSTRIES, LTD. (1)
5,021,186 Chloroisocyanuric acid composition having storage stability 77 1989
 
Microwave Imaging Systems Technologies, Inc. (2)
5,841,288 Two-dimensional microwave imaging apparatus and methods 124 1997
6,448,788 Fixed array microwave imaging apparatus and method 110 2000
 
OLYMPUS OPTICAL CO., LTD. (2)
5,367,165 Cantilever chip for scanning probe microscope 78 1993
6,811,406 Microelectronic spring with additional protruding member 194 2001
 
CASCADE MICROTECH, INC. (27)
4,697,143 Wafer probe 201 1984
4,827,211 Wafer probe 127 1987
4,849,689 Microwave wafer probe having replaceable probe tip 128 1988
5,045,781 High-frequency active probe having replaceable contact needles 110 1991
5,266,889 Wafer probe station with integrated environment control enclosure 135 1992
5,457,398 Wafer probe station having full guarding 123 1993
5,506,515 High-frequency probe tip assembly 160 1994
5,610,529 Probe station having conductive coating added to thermal chuck insulator 138 1995
5,565,788 Coaxial wafer probe with tip shielding 148 1995
5,914,613 Membrane probing system with local contact scrub 120 1996
6,232,788 Wafer probe station for low-current measurements 88 1997
6,034,533 Low-current pogo probe card 111 1997
6,137,302 Low-current probe card with reduced triboelectric current generating cables 112 1997
6,256,882 Membrane probing system 78 1998
6,578,264 Method for constructing a membrane probe using a depression 79 2000
6,708,386 Method for probing an electrical device having a layer of oxide thereon 18 2001
6,860,009 Probe construction using a recess 12 2001
6,549,106 Waveguide with adjustable backshort 120 2001
6,724,205 Probe for combined signals 98 2002
6,815,963 Probe for testing a device under test 65 2003
6,806,724 Probe for combined signals 95 2003
6,930,498 Membrane probing system 57 2004
7,009,383 Wafer probe station having environment control enclosure 93 2004
7,187,188 Chuck with integrated wafer support 79 2004
7,266,889 Membrane probing system 10 2005
7,148,711 Membrane probing system 15 2005
7,368,927 Probe head having a membrane suspended probe 31 2005
 
HYPRES, INC. (1)
4,894,612 Soft probe for providing high speed on-wafer connections to a circuit 158 1988
 
Electric Power Research Institute, Inc. (1)
4,487,996 Shielded electrical cable 106 1982
 
National Semiconductor Corporation (4)
4,757,255 Environmental box for automated wafer probing 194 1986
5,814,847 General purpose assembly programmable multi-chip package substrate 96 1996
5,883,522 Apparatus and method for retaining a semiconductor wafer during testing 107 1996
7,096,133 Method of establishing benchmark for figure of merit indicative of amplifier flicker noise 73 2005
 
DELPHI TECHNOLOGIES, INC. (1)
7,015,709 Ultra-broadband differential voltage probes 102 2004
 
MERCK & CO., INC. (1)
7,013,221 Iterative probe design and detailed expression profiling with flexible in-situ synthesis arrays 96 2000
 
SARANTEL LIMITED (3)
6,184,845 Dielectric-loaded antenna 138 1997
6,369,776 Antenna 92 1999
6,914,580 Dielectrically-loaded antenna 83 2003
 
SNAP-ON TECHNOLOGIES, INC. (1)
6,940,283 Detecting field from different ignition coils using adjustable probe 55 2003
 
XCERRA CORPORATION (1)
7,015,711 Apparatus and method for the testing of circuit boards, and test probe for this apparatus and this method 107 2004
 
MARTEK, INC. (3)
5,656,942 Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane 111 1995
6,096,567 Method and apparatus for direct probe sensing 146 1997
6,320,372 Apparatus and method for testing a substrate having a plurality of terminals 101 1999
 
NORTEL NETWORKS LIMITED (1)
4,853,624 Tunable microwave wafer probe 93 1988
 
ABBOTT DIABETES CARE INC. (1)
2005/0165,316 Method for detecting artifacts in data 77 2004
 
GCB INDUSTRIES, INC. (1)
6,229,327 Broadband impedance matching probe 117 1997
 
VEGA GRIESHABER KG (1)
7,030,827 Planar antenna and antenna system 74 2004
 
PURDUE RESEARCH FOUNDATION (1)
2004/0147,034 Method and apparatus for measuring a substance in a biological sample 135 2003
 
INTEST CORPORATION (1)
5,900,737 Method and apparatus for automated docking of a test head to a device handler 116 1996
 
GTE Valeron Corporation (1)
4,401,945 Apparatus for detecting the position of a probe relative to a workpiece 97 1981
 
INTEST IP CORPORATION (1)
4,705,447 Electronic test head positioner for test systems 137 1985
 
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY (1)
6,528,993 Magneto-optical microscope magnetometer 80 2000
 
GILLESPIE, ROBB S. (1)
6,481,939 Tool tip conductivity contact sensor and method 91 2001
 
MARTIN MARIETTA CORPORATION (1)
5,867,073 Waveguide to transmission line transition 84 1994
 
ELECTRONICS RESEARCH, INC. (1)
2004/0100,276 Method and apparatus for calibration of a vector network analyzer 101 2002
 
INTELLECTUAL VENTURES I LLC (1)
5,633,780 Electrostatic discharge protection device 133 1996
 
GE CAPITAL EQUITY INVESTMENTS, INC. (1)
6,628,980 Apparatus, systems, and methods for in vivo magnetic resonance imaging 189 2001
 
SCHLUMBERGER TECHNOLOGY CORPORATION (1)
4,766,384 Well logging apparatus for determining dip, azimuth, and invaded zone conductivity 101 1986
 
The United States of America as represented by the Secretary of the Army (1)
6,731,804 Thermal luminescence liquid monitoring system and method 81 2000
 
The United States of America as represented by the Secretary of the Air Force (4)
4,754,239 Waveguide to stripline transition assembly 91 1986
5,631,571 Infrared receiver wafer level probe testing 145 1996
6,215,295 Photonic field probe and calibration means thereof 115 1998
2003/0170,898 Method for intracellular modifications within living cells using pulsed electric fields 125 2002
 
STORAGE TECHNOLOGY CORPORATION (1)
5,469,324 Integrated decoupling capacitive core for a printed circuit board and method of making same 122 1994
 
INIZIATIVE MARITTIME 1991, S.R.L. (1)
5,245,292 Method and apparatus for sensing a fluid handling 75 1992
 
HITACHI HIGH-TECH SCIENCE CORPORATION (1)
6,621,082 Automatic focusing system for scanning electron microscope equipped with laser defect detection function 100 2002
 
Trio-Tech International (1)
6,605,955 Temperature controlled wafer chuck system with low thermal resistance 104 2000
 
TRUSTEES OF DARTMOUTH COLLEGE (1)
5,833,601 Methodology for determining oxygen in biological systems 85 1997
 
Aries Electronics, Inc. (1)
6,937,045 Shielded integrated circuit probe 65 2004
 
WINWAY TECHNOLOGY CO., LTD. (2)
6,160,412 Impedance-matched interconnection device for connecting a vertical-pin integrated circuit probing device to integrated circuit test equipment 65 1998
6,927,586 Temperature compensated vertical pin probing device 61 2003
 
JEOL RESONANCE INC. (1)
6,914,430 NMR probe 59 2004
 
CIRCUIT COMPONENTS, INCORPORATED (1)
4,793,814 Electrical circuit board interconnect 301 1986
 
General Dielectric, Inc. (1)
2002/0050,828 Multi-feed microwave reflective resonant sensors 79 2001
 
Aehr Test Systems (2)
6,340,895 Wafer-level burn-in and test cartridge 107 1999
6,580,283 Wafer level burn-in and test methods 88 1999
 
EUROPAEISCHES LABORATORIUM FUER MOLEKULARBIOLOGIE (EMBL) (2)
6,798,226 Multiple local probe measuring device and method 93 2002
6,943,574 Multiple local probe measuring device and method 63 2004
 
APPLIED MATERIALS, INC. (4)
5,916,689 Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect 123 1996
5,874,361 Method of processing a wafer within a reaction chamber 108 1996
6,257,564 Vacuum chuck having vacuum-nipples wafer support 108 1998
6,232,787 Microstructure defect detection 161 1999
 
SOHN, LYDIA L. (1)
2003/0072,549 Method and apparatus for dielectric spectroscopy of biological solutions 114 2002
 
Dimension Polyant Sailcloth, Inc. (1)
6,013,586 Tent material product and method of making tent material product 91 1997
 
GYRUS MEDICAL LIMITED (1)
6,409,724 Electrosurgical instrument 267 2000
 
ALSTOM (1)
5,813,847 Device and method for injecting fuels into compressed gaseous media 77 1996
 
TOKYO ELECTRON LIMITED (33)
4,998,062 Probe device having micro-strip line structure 91 1989
5,084,671 Electric probing-test machine having a cooling system 189 1990
5,091,692 Probing test device 116 1990
5,198,752 Electric probing-test machine having a cooling system 156 1991
5,315,237 Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit 113 1991
5,321,352 Probe apparatus and method of alignment for the same 132 1992
5,321,453 Probe apparatus for probing an object held above the probe card 103 1992
5,635,846 Test probe having elongated conductor embedded in an elostomeric material which is mounted on a space transformer 182 1993
5,404,111 Probe apparatus with a swinging holder for an object of examination 113 1993
5,517,126 Probe apparatus 133 1993
5,521,522 Probe apparatus for testing multiple integrated circuit dies 144 1993
5,539,676 Method of identifying probe position and probing method in prober 94 1994
5,811,982 High density cantilevered probe for electronic devices 170 1996
5,777,485 Probe method and apparatus with improved probe contact 119 1996
5,910,727 Electrical inspecting apparatus with ventilation system 90 1996
5,821,763 Test probe for high density integrated circuits, methods of fabrication thereof and methods of use thereof 216 1996
5,804,983 Probe apparatus with tilt correction mechanisms 152 1997
6,334,247 High density integrated circuit apparatus, test probe and methods of use thereof 138 1997
5,914,614 High density cantilevered probe for electronic devices 97 1997
5,999,268 Apparatus for aligning a semiconductor wafer with an inspection contactor 118 1997
6,060,892 Probe card attaching mechanism 98 1997
6,300,780 High density integrated circuit apparatus, test probe and methods of use thereof 115 1998
6,124,725 Apparatus and method for testing semiconductor devices formed on a semiconductor wafer 136 1998
6,329,827 High density cantilevered probe for electronic devices 75 1998
6,414,478 Transfer mechanism for use in exchange of probe card 80 2000
6,722,032 Method of forming a structure for electronic devices contact locations 63 2001
7,005,842 Probe cartridge assembly and multi-probe assembly 93 2001
6,927,587 Probe apparatus 65 2003
6,906,542 Probing method and prober 61 2003
6,794,888 Probe device 76 2003
7,026,832 Probe mark reading device and probe mark reading method 96 2003
7,009,415 Probing method and probing apparatus 95 2004
7,023,226 Probe pins zero-point detecting method, and prober 93 2004
 
PHILIPS ELECTRONICS NORTH AMERICA CORPORATION (1)
4,593,243 Coplanar and stripline probe card apparatus 115 1984
 
NGK Insulators, Ltd. (2)
5,280,156 Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means 220 1991
6,001,760 Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck 116 1997
 
CARDIFF AND VALE NHS TRUST (1)
2004/0175,294 Apparatus and method for analysing a biological sample in response to microwave radiation 76 2004
 
J.A. WOOLLAM CO., INC. (1)
6,937,341 System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation 86 2002
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,909,300 Method for fabricating microelectronic fabrication electrical test apparatus electrical probe tip having pointed tips 56 2002
6,902,941 Probing of device elements 100 2003
 
HITACHI, LTD. (1)
2005/0186,696 Gas flowmeter and manufacturing method thereof 0 2005
 
DCG SYSTEMS, INC. (2)
5,530,372 Method of probing a net of an IC at an optimal probe-point 118 1994
5,675,499 Optimal probe point placement 111 1996
 
Sirotech Ltd. (1)
5,824,494 Method for enumerating bacterial populations 95 1995
 
GATAN, INC. (1)
6,914,244 Ion beam milling system and method for electron microscopy specimen preparation 89 2004
 
SKYWORKS SOLUTIONS, INC. (2)
6,582,979 Structure and method for fabrication of a leadless chip carrier with embedded antenna 93 2001
6,770,955 Shielded antenna in a semiconductor package 101 2001
 
APPLE INC. (1)
5,617,035 Method for testing integrated devices 110 1995
 
GOOGLE TECHNOLOGY HOLDINGS LLC (2)
5,793,213 Method and apparatus for calibrating a network analyzer 94 1996
5,751,252 Method and antenna for providing an omnidirectional pattern 96 1997
 
BOARD OF REGENTS OF THE UNIVERSITY OF WISCONSIN SYSTEM, THE, AN INSTITUTE OF WI (1)
5,233,306 Method and apparatus for measuring the permittivity of materials 130 1991
 
The United States of America as represented by the United States Department of Energy (2)
5,523,694 Integrated circuit failure analysis by low-energy charge-induced voltage alteration 122 1994
6,307,672 Microscope collision protection apparatus 82 1996
 
KABUSHIKI KAISHA TOSHIBA (1)
7,032,307 Method for fabricating a probe pin for testing electrical characteristics of an apparatus 93 2004
 
WESTERNGECO L.L.C. (1)
6,912,468 Method and apparatus for contemporaneous utilization of a higher order probe in pre-stack and post-stack seismic domains 62 2003
 
BELL TELEPHONE LABORATORIES, INCORPORATED (1)
4,684,883 Method of manufacturing high-quality semiconductor light-emitting devices 97 1985
 
RAYTHEON COMPANY (4)
5,069,628 Flexible electrical cable connector with double sided dots 72 1990
5,395,253 Membrane connector with stretch induced micro scrub 116 1993
5,600,256 Cast elastomer/membrane test probe assembly 78 1995
6,211,837 Dual-window high-power conical horn antenna 85 1999
 
TENCOR INSTRUMENTS (2)
4,755,746 Apparatus and methods for semiconductor wafer testing 156 1985
5,852,232 Acoustic sensor as proximity detector 137 1997
 
EATON CORPORATION (1)
4,904,935 Electrical circuit board text fixture having movable platens 114 1988
 
THK CO., LTD. (1)
4,899,998 Rotational positioning device 107 1988
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (25)
4,744,041 Method for testing DC motors 118 1985
4,831,494 Multilayer capacitor 156 1988
4,922,128 Boost clock circuit for driving redundant wordlines and sample wordlines 80 1989
4,987,100 Flexible carrier for an electronic device 82 1989
5,001,423 Dry interface thermal chuck temperature control system for semiconductor wafer testing 135 1990
5,207,585 Thin interface pellicle for dense arrays of electrical interconnects 179 1990
5,061,192 High density connector 151 1990
5,371,654 Three dimensional high performance interconnection package 297 1992
5,537,372 High density data storage system with topographic contact sensor 115 1993
5,531,022 Method of forming a three dimensional high performance interconnection package 200 1994
5,532,608 Ceramic probe card and method for reducing leakage current 64 1995
5,804,982 Miniature probe positioning actuator 106 1995
5,726,211 Process for making a foamed elastometric polymer 103 1996
5,756,021 Electronic devices comprising dielectric foamed polymers 89 1996
5,700,844 Process for making a foamed polymer 144 1996
5,723,347 Semi-conductor chip test probe and process for manufacturing the probe 108 1996
5,838,160 Integral rigid chip test probe 83 1996
5,926,029 Ultra fine probe contacts 107 1997
6,059,982 Micro probe assembly and method of fabrication 151 1997
5,804,607 Process for making a foamed elastomeric polymer 120 1997
6,104,201 Method and apparatus for passive characterization of semiconductor substrates subjected to high energy (MEV) ion implementation using high-injection surface photovoltage 72 1998
6,404,211 Metal buckling beam probe 26 1999
6,206,273 Structures and processes to create a desired probetip contact geometry on a wafer test probe 111 1999
6,943,571 Reduction of positional errors in a four point probe resistance measurement 62 2003
7,007,380 TFI probe I/O wrap test method 93 2004
 
ADVANCED MICRO DEVICES, INC. (1)
6,396,296 Method and apparatus for electrical characterization of an integrated circuit package using a vertical probe station 102 2000
 
GENETRONICS, INC. (1)
5,869,326 Electroporation employing user-configured pulsing scheme 118 1996
 
TIOGA TECHNOLOGIES, INC. (1)
6,459,739 Method and apparatus for RF common-mode noise rejection in a DSL receiver 110 1999
 
SIEMENS AKTIENGESELLSCHAFT (2)
4,805,627 Method and apparatus for identifying the distribution of the dielectric constants in an object 107 1986
5,095,891 Connecting cable for use with a pulse generator and a shock wave generator 98 1987
 
KEYSIGHT TECHNOLOGIES, INC. (4)
5,493,070 Measuring cable and measuring system 97 1994
6,300,775 Scattering parameter calibration system and method 130 1999
2004/0095,145 Method and apparatus for performing multiport through-reflect-line calibration and measurement 97 2002
2004/0199,350 System and method for determining measurement errors of a testing device 94 2003
 
ELM TECHNOLOGY CORPORATION (2)
5,020,219 Method of making a flexible tester surface for testing integrated circuits 180 1989
5,453,404 Method for making an interconnection structure for integrated circuits 134 1994
 
DRNC HOLDINGS, INC. (1)
6,987,483 Effectively balanced dipole microstrip antenna 80 2003
 
ROUND ROCK RESEARCH, LLC (1)
5,126,286 Method of manufacturing edge connected semiconductor die 162 1990
 
Vatell Corporation (1)
6,278,051 Differential thermopile heat flux transducer 100 2000
 
HP HOLDINGS THREE, INC. (1)
5,995,914 Method and apparatus for asynchronously measuring frequency shifted signals 103 1996
 
ROBERT BOSCH GMBH (2)
6,066,911 Ultrasonic driving element 125 1998
6,948,981 Compact coupler plug, particularly for a planar broadband lambda probe, in which single-conductor seals are prevented from being lost 55 2002
 
SARNOFF CORPORATION (1)
5,993,611 Capacitive denaturation of nucleic acid 138 1997
 
EVERETT CHARLES TECHNOLOGIES, INC. (1)
5,214,374 Dual level test fixture 105 1991
 
HARRIS CORPORATION (3)
5,854,608 Helical antenna having a solid dielectric core 143 1994
6,181,297 Antenna 103 1998
6,424,316 Helical antenna 90 2000
 
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA (1)
5,267,088 Code plate mounting device 84 1990
 
Integral Technologies, Inc. (1)
7,006,046 Low cost electronic probe devices manufactured from conductive loaded resin-based materials 95 2004
 
W. L. GORE & ASSOCIATES, INC. (8)
4,871,883 Electro-magnetic shielding 121 1987
4,859,989 Security system and signal carrying member thereof 129 1987
5,061,823 Crush-resistant coaxial transmission line 134 1990
5,107,076 Easy strip composite dielectric coaxial signal cable 124 1991
5,477,011 Low noise signal transmission cable 112 1994
5,896,038 Method of wafer level burn-in 109 1996
6,032,714 Repeatably positionable nozzle assembly 79 1999
7,015,708 Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts 95 2003
 
ADE CORPORATION (1)
5,642,298 Wafer testing and self-calibration system 116 1996
 
Biotronic Systems Corporation (1)
5,082,627 Three dimensional binding site array for interfering with an electrical field 86 1987
 
Crown Products, Inc. (1)
7,019,541 Electric conductivity water probe 97 2004
 
SEMICONDUCTOR DIAGNOSTICS, INC. (1)
6,114,865 Device for electrically contacting a floating semiconductor wafer having an insulating film 112 1999
 
HOUSTON ADVANCED RESEARCH CENTER, A CORP. OF TX (1)
5,846,708 Optical and electrical methods and apparatus for molecule detection 403 1992
 
LAM RESEARCH CORPORATION (1)
7,015,703 Radio frequency Langmuir probe 102 2004
 
ADVANTEST (SINGAPORE) PTE. LTD. (2)
6,812,718 Massively parallel interface for electronic circuits 110 2001
6,917,525 Construction structures and manufacturing processes for probe card assemblies and packages having wafer level springs 116 2002
 
FREESCALE SEMICONDUCTOR, INC. (5)
5,172,050 Micromachined semiconductor probe card 274 1991
5,177,438 Low resistance probe for semiconductor 174 1991
5,467,024 Integrated circuit test with programmable source for both AC and DC modes of operation 86 1993
5,666,063 Method and apparatus for testing an integrated circuit 107 1996
5,982,166 Method for measuring a characteristic of a semiconductor wafer using cylindrical control 108 1997
 
BERTHOLD TECHNOLOGIES GMBH & CO. KG (1)
5,369,368 Device for determining material parameters by means of microwave measurements 81 1993
 
EDO CORPORATION, BARNES DIVISION (1)
4,755,874 Emission microscopy system 163 1987
 
TRIQUINT SEMICONDUCTOR, INC. (1)
4,853,627 Wafer probes 104 1988
 
ALTERA CORPORATION (1)
* 5,744,383 Integrated circuit package fabrication method 28 1995
 
FAIRCHILD SEMICONDUCTOR CORPORATION (1)
5,357,211 Pin driver amplifier 84 1993
 
JPK INSTRUMENTS AG (1)
7,022,985 Apparatus and method for a scanning probe microscope 99 2002
 
STOVOKOR TECHNOLOGY LLC (1)
4,991,290 Flexible electrical interconnect and method of making 120 1989
 
MEDICAL COLLEGE OF GEORGIA RESEARCH INSTITUTE, INC. (1)
5,488,954 Ultrasonic transducer and method for using same 144 1994
 
D-LINK CORPORATION (1)
6,778,140 Atch horn antenna of dual frequency 73 2003
 
MAGMA DESIGN AUTOMATION, INC. (1)
5,030,907 CAD driven microprobe integrated circuit tester 113 1989
 
WINBOND ELECTRONICS CORP. (1)
6,611,417 Wafer chuck system 82 2001
 
Shoshotech Co., Ltd. (1)
6,351,885 Method of making conductive bump on wiring board 64 1998
 
RCA Corporation (1)
4,651,115 Waveguide-to-microstrip transition 82 1985
 
HITACHI SOFTWARE ENGINEERING CO., LTD. (1)
7,035,738 Probe designing apparatus and probe designing method 94 2002
 
SAE Magnetics (H.K.) Ltd. (1)
7,015,689 Connection method for probe pins for measurement of characteristics of thin-film magnetic head and characteristic measurement method for thin-film magnetic head 95 2003
 
SWCC SHOWA CABLE SYSTEMS CO., LTD. (1)
6,944,380 Optical fiber for transmitting ultraviolet ray, optical fiber probe, and method of manufacturing the optical fiber probe 65 2002
 
GENERAL ELECTRIC COMPANY (3)
6,927,598 Test probe for electrical devices having low or no wedge depression 58 2003
6,911,826 Pulsed eddy current sensor probes and inspection methods 64 2003
7,015,690 Omnidirectional eddy current probe and inspection system 100 2004
 
Star Technologies Inc. (1)
6,906,543 Probe card for electrical testing a chip in a wide temperature range 64 2003
 
QUALCOMM INCORPORATED (1)
6,737,920 Variable gain amplifier 78 2002
 
Sematech, Inc. (2)
5,159,264 Pneumatic energy fluxmeter 80 1991
5,159,267 Pneumatic energy fluxmeter 82 1992
 
COMPAQ COMPUTER CORPORATION (1)
5,500,606 Completely wireless dual-access test fixture 114 1993
 
HITACHI ULSI SYSTEMS CO., LTD. (1)
6,734,687 Apparatus for detecting defect in device and method of detecting defect 111 2001
 
INTERSTITIAL, LLC (3)
5,704,355 Non-invasive system for breast cancer detection 138 1995
5,829,437 Microwave method and system to detect and locate cancers in heterogenous tissues 140 1996
6,061,589 Microwave antenna for cancer detection system 133 1997
 
RUDOLPH TECHNOLOGIES, INC. (1)
6,710,798 Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card 112 1999
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (6)
4,983,910 Millimeter-wave active probe 73 1988
4,916,002 Microcasting of microminiature tips 138 1989
5,003,253 Millimeter-wave active probe system 79 1989
5,847,569 Electrical contact probe for sampling high frequency electrical signals 97 1996
5,981,268 Hybrid biosensors 152 1997
6,051,422 Hybrid biosensors 132 1998
 
CHIPMOS TECHNOLOGIES INC. (1)
6,946,860 Modularized probe head 56 2003
 
BROOKS AUTOMATION, INC. (1)
5,539,323 Sensor for articles such as wafers on end effector 125 1993
 
ERICSSON INC. (1)
5,949,383 Compact antenna structures including baluns 117 1997
 
Yulim Hitech, Inc. (2)
6,922,069 Needle assembly of probe card 62 2003
7,014,499 Probe card for testing semiconductor device 96 2005
 
PICO TECHNOLOGY HOLDINGS, INC. (1)
6,335,625 Programmable active microwave ultrafine resonance spectrometer (PAMURS) method and systems 86 2000
 
LAURENCE J. MARHOEFER (1)
5,097,101 Method of forming a conductive contact bump on a flexible substrate and a flexible substrate 96 1991
 
RENISHAW PLC (2)
5,270,664 Probe for measuring surface roughness by sensing fringe field capacitance effects 126 1992
6,909,983 Calibration of an analogue probe 66 2002
 
EASTMAN KODAK COMPANY (1)
5,848,500 Light-tight enclosure and joint connectors for enclosure framework 110 1997
 
GILBOE, DEREK (1)
7,034,553 Direct resistance measurement corrosion probe 96 2003
 
Temptronic Corporation (1)
6,415,858 Temperature control system for a workpiece chuck 98 1997
 
MEDICAL DEVICE INNOVATIONS LIMITED (1)
2006/0155,270 Tissue ablation apparatus and method of ablating tissue 151 2003
 
UNISYS CORPORATION (1)
4,922,192 Elastic membrane probe 81 1988
 
Carl-Zeiss-Stiftung (1)
4,515,439 Attachment of microscope objectives 82 1982
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
* 2009/0302,234 Method and Apparatus for Observing Inside Structures, and Specimen Holder 4 2008
 
TERADYNE, INC. (1)
9,435,855 Interconnect for transmitting signals between a device and a tester 0 2013
 
HITACHI, LTD. (1)
* 8,134,131 Method and apparatus for observing inside structures, and specimen holder 7 2008
 
CASCADE MICROTECH, INC. (2)
* 8,451,017 Membrane probing method using improved contact 2 2010
* 2010/0271,060 MEMBRANE PROBING METHOD USING IMPROVED CONTACT 1 2010
* Cited By Examiner

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