Dynamic quantity sensor
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United States of America Patent
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Jul 27, 2010
Issued Date -
N/A
app pub date -
Aug 28, 2007
filing date -
Sep 20, 2006
priority date (Note) -
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Abstract
A dynamic quantity sensor includes a base, a sensor chip made of a rectangular board having a corner portion, and a bump. The sensor chip includes a detector, and a plurality of pads. The detector has a movable part, which is displaceable when a dynamic quantity is applied thereto, and detects the dynamic quantity based on a capacitance variation in accordance with a displacement of the movable part. The bump connects the plurality of pads of the sensor chip and the base. The corner portion of the sensor chip is released from the base such that the plurality of pads of the sensor chip is arranged at a location a predetermined distance from the corner portion of the sensor chip.
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