Method and apparatus for thin film/layer fabrication and deposition
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United States of America Patent
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Jul 27, 2010
Grant Date -
Jul 16, 2009
app pub date -
Jan 12, 2009
filing date -
Jul 12, 2006
priority date (Note) -
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Abstract
A method and apparatus for controlling the thickness of a thin film or thin layer of discrete particles or of a heterogeneous mixture characterized in that the interfacial tension forces between the solution or suspension and its environment are used as the driving forces to evenly spread the solution, suspension or mixture while the solvent evaporates and/or dilutes.
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