Substrate treatment apparatus
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United States of America Patent
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Aug 3, 2010
Grant Date -
Mar 19, 2009
app pub date -
Aug 20, 2007
filing date -
Nov 30, 2005
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A substrate treatment apparatus, which treats a substrate with a treatment liquid that is ultrasonically vibrated, includes an oscillator body which is rectangular-parallelepiped and has a treatment liquid supply path having an opening on a lower surface thereof in a first end portion in a longitudinal direction thereof and inclining to a second end portion in the longitudinal direction thereof, a vibrator which is provided on an upper surface of the oscillator body and ultrasonically vibrates the oscillator, and a heat exchanger which cools the treatment liquid supplied to the treatment liquid supply path.
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