Bulk acoustic resonators with multi-layer electrodes
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United States of America Patent
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Aug 3, 2010
Grant Date -
Dec 10, 2009
app pub date -
Jun 9, 2008
filing date -
Jun 9, 2008
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Abstract
Bulk acoustic resonators with multi-layer electrodes for Bulk Acoustic Wave (BAW) resonator devices. Various electrode combinations are disclosed. The invention provides a better compromise at resonant frequencies from 1800 MHz to 4 GHz in terms of keff2 and resistance than state of the art solutions using either Mo, or a bilayer of Al and W.
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