Piezoelectric thin film device and method for manufacturing the same

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United States of America Patent

PATENT NO 7770274
APP PUB NO 20080072408A1
SERIAL NO

11946910

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA TOSHIBA1-1 SHIBAURA 1-CHOME MINATO-KU TOKYO 105-0023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abe, Kazuhide Kawasaki, JP 96 1795
Hasunuma, Masahiko Yokohama, JP 59 1024
Itaya, Kazuhiko Yokohama, JP 83 2032
Kawakubo, Takashi Yokohama, JP 82 2110
Nagano, Toshihiko Kawasaki, JP 43 837
Nishigaki, Michihiko Kawasaki, JP 60 802
Ohara, Ryoichi Yokohama, JP 41 765
Sano, Kenya Kawasaki, JP 35 806
Shibata, Hironobu Edogawa-ku, JP 24 355
Toyoda, Hiroshi Kamakura, JP 90 876
Yanase, Naoko Kawasaki, JP 32 477
Yasumoto, Takaaki Kawasaki, JP 45 808

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