Periodic dimple array
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United States of America Patent
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Aug 10, 2010
Grant Date -
Mar 19, 2009
app pub date -
Dec 3, 2007
filing date -
Sep 14, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
A microelectromechanical (MEMS) device includes a substrate, an actuation electrode over the substrate, a reflective layer over the actuation electrode, and a support layer between the actuation electrode and the reflective layer. The reflective layer includes at least one aperture through the reflective layer. The support layer includes a recess between the actuation electrode and the at least one aperture. Upon application of a control signal to the device, at least a first portion of the reflective layer is configured to move into the recess and at least a second portion of the reflective layer is configured to remain stationary. The reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion.
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