Substrate accommodating apparatus with loop-shaped binding member
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United States of America Patent
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Aug 17, 2010
Grant Date -
Nov 5, 2009
app pub date -
Apr 24, 2006
filing date -
Oct 7, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A substrate accommodating apparatus (10) is constituted by stacking a plurality of accommodation bodies (20) on an upper surface of a rigid plate (15). Each accommodation body (20) is provided with a buffer (21) having elasticity and some conductivity and a load receptacle (22) having a frame-shaped body, while an upper surface of the buffer (21) is provided with a substrate protect layer (23) made of cellulose. The substrate accommodating apparatus (10) is arranged to enclose a substrate (S) therein by stacking the accommodation bodies (20) where the substrates are placed, and when the accommodation bodies (20) are stacked, each load receptacle (22) places the load of the respective accommodation body (20) on a periphery of the adjacent lower accommodation body (20) so that any load is not placed on the central portion of the lower accommodation body (20) where the substrate (S) is placed.
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