Semiconductor memory device and manufacturing method for semiconductor device

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United States of America Patent

PATENT NO 7776691
APP PUB NO 20090053868A1
SERIAL NO

12289020

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Abstract

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using cleaning or wet etching, and a process for forming charge storage film in the hole.

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Patent Owner(s)

Patent OwnerAddress
LAPIS SEMICONDUCTOR CO LTD2-4-8 SHINYOKOHAMA KOUHOKU-KU YOKOHAMA 222-8575

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kurachi, Ikuo Tokyo, JP 21 38
Maruyama, Tetsuhiro Tokyo, JP 4 38
Nakamura, Takaharu Tokyo, JP 61 748
Tsujimoto, Masao Miyazaki, JP 5 5

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