Semiconductor memory device and manufacturing method for semiconductor device

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Aug 17, 2010
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Feb 26, 2009
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Oct 17, 2008
filing date
Jun 30, 2005

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Abstract

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using cleaning or wet etching, and a process for forming charge storage film in the hole.

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Patent Owner(s)

LAPIS SEMICONDUCTOR CO., LTD.;OKI SEMICONDUCTOR CO., LTD.

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Kurachi, Ikuo	Tokyo, JP	20	38
Maruyama, Tetsuhiro	Tokyo, JP	4	31
Nakamura, Takaharu	Tokyo, JP	60	743
Tsujimoto, Masao	Miyazaki, JP	5	5

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Semiconductor memory device and manufacturing method for semiconductor device

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United States of America Patent

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PATENT NO	7776691
APP PUB NO	20090053868A1
SERIAL NO	12289020
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 17, 2010	US,7776691,B2 US7776691B2	GRANTED PATENT AS SECOND PUBLICATION
February 26, 2009	US,20090053868,A1 US20090053868A1	FIRST PUBLISHED PATENT APPLICATION

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