Electronic device manufacturing chamber method
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United States of America Patent
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Aug 31, 2010
Grant Date -
May 18, 2006
app pub date -
Aug 29, 2005
filing date -
Jun 2, 2004
priority date (Note) -
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Abstract
A non-polygon shaped, multi-piece chamber is provided. A non-polygon shaped, multi-piece chamber may include (1) a central piece having a first side and a second side, (2) a first side piece adapted to couple with the first side of the central piece, and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece, and the second side piece form a cylindrical overall shape when coupled together. Numerous other aspects are provided.
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