Tunable dielectric radio frequency microelectromechanical system capacitive switch

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United States of America Patent

PATENT NO 7786820
APP PUB NO 20060208823A1
SERIAL NO

11374815

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Abstract

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The invention is a tunable RF MEMS switch developed with a BST dielectric at the contact interface. BST has a very high dielectric constant (>300) making it very appealing for RF MEMS capacitive switches. The tunable dielectric constant of BST provides a possibility of making linearly tunable MEMS capacitive switches. The capacitive tunable RF MEMS switch with a BST dielectric is disclosed showing its characterization and properties up to 40 GHz.

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Patent Owner(s)

Patent OwnerAddress
NGIMAT CO 1ST JOINT ASSIGNEE5315 PEACHTREE INDUSTRIAL BLVD ATLANTA GA 30341-2107

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hunt, Andrew Tye Atlanta, US 26 503
Papapolymerou, Ioannis (John) Decatur, US 1 4
Polley, Todd A Suwanee, US 2 51
Wang, Guoan Atlanta, US 42 248

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