Method for cleaning a surface of a photomask
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 7, 2010
Grant Date -
May 24, 2007
app pub date -
Oct 20, 2006
filing date -
Oct 21, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
in a supercritical state, to the vessel. An additive, such as alcohol, water ketones, esters, surfactants, and organic solvents, can be added to the fluid. The vessel can be held under a pressure higher than the critical pressure of the fluid and at a temperature higher than the critical temperature of the fluid.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully