Treatment of substrate using functionalizing agent in supercritical carbon dioxide

United States of America Patent

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Sep 7, 2010
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Nov 16, 2006
app pub date
May 13, 2005
filing date
May 13, 2005

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and are more easily removed than their predecessors.

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TOKYO ELECTRON LIMITED	TOKYO

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Inventor Name	Address	# of filed Patents	Total Citations
Kevwitch, Robert	Chandler, US	10	63

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Treatment of substrate using functionalizing agent in supercritical carbon dioxide

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United States of America Patent

10908474

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PATENT NO	7789971
APP PUB NO	20060254615A1
SERIAL NO	10908474
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
September 07, 2010	US,7789971,B2 US7789971B2	GRANTED PATENT AS SECOND PUBLICATION
November 16, 2006	US,20060254615,A1 US20060254615A1	FIRST PUBLISHED PATENT APPLICATION

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10908474

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