Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
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United States of America Patent
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Sep 7, 2010
Grant Date -
Jun 22, 2006
app pub date -
Dec 22, 2004
filing date -
Dec 22, 2004
priority date (Note) -
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Abstract
An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, and a second electrode. The substrate has a first surface and the first electrode is adjacent the first surface of the substrate. The layer of piezoelectric material is adjacent the first electrode. The second electrode is adjacent the layer of piezoelectric material, and the second electrode lies in a first plane and has an edge. The layer of piezoelectric material has a recessed feature adjacent the edge of the second electrode.
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