Moveable micro-electromechanical device

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United States of America Patent

PATENT NO 7791787
SERIAL NO

12363671

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Abstract

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A MEMS device is provided. The MEMS device may include a first plate, a second plate and a third plate. The MEMS device may also include a first power supply configured to provide a voltage to the first plate and a second power supply configured apply a voltage to the second plate. In some embodiments, a third power supply may provide a voltage to the third plate.

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Patent Owner(s)

Patent OwnerAddress
SNAPTRACK INC5775 MOREHOUSE DR SAN DIEGO CA 92121

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miles, Mark W Atlanta, US 140 17545

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