US Patent No: 7,795,061

Number of patents in Portfolio can not be more than 2000

Method of creating MEMS device cavities by a non-etching process

ALSO PUBLISHED AS: 20070155051

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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MEMS devices (such as interferometric modulators) may be fabricated using a sacrificial layer that contains a heat vaporizable polymer to form a gap between a moveable layer and a substrate. One embodiment provides a method of making a MEMS device that includes depositing a polymer layer over a substrate, forming an electrically conductive layer over the polymer layer, and vaporizing at least a portion of the polymer layer to form a cavity between the substrate and the electrically conductive layer. Another embodiment provides a method for making an interferometric modulator that includes providing a substrate, depositing a first electrically conductive material over at least a portion of the substrate, depositing a sacrificial material over at least a portion of the first electrically conductive material, depositing an insulator over the substrate and adjacent to the sacrificial material to form a support structure, and depositing a second electrically conductive material over at least a portion of the sacrificial material, the sacrificial material being removable by heat-vaporization to thereby form a cavity between the first electrically conductive layer and the second electrically conductive layer.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA659

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lan, Jeffrey Cupertino, CA 3 21
Sasagawa, Teruo Los Gatos, CA 88 831
Wang, Chun-Ming Taipei County, TW 73 532

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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4,482,213 Perimeter seal reinforcement holes for plastic LCDs 224 1982
4,571,603 Deformable mirror electrostatic printer 366 1984
4,566,935 Spatial light modulator and method 512 1984
4,710,732 Spatial light modulator and method 490 1984
4,596,992 Linear spatial light modulator and printer 395 1984
4,615,595 Frame addressed spatial light modulator 396 1984
4,662,746 Spatial light modulator and method 495 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 284 1988
4,956,619 Spatial light modulator 581 1988
5,079,544 Standard independent digitized video system 348 1989
5,028,939 Spatial light modulator system 393 1989
4,954,789 Spatial light modulator 570 1989
5,037,173 Optical interconnection network 320 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 302 1990
5,083,857 Multi-level deformable mirror device 535 1990
5,142,405 Bistable DMD addressing circuit and method 341 1990
5,061,049 Spatial light modulator and method 735 1990
5,192,395 Method of making a digital flexure beam accelerometer 206 1990
5,096,279 Spatial light modulator and method 510 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 317 1991
5,226,099 Digital micromirror shutter device 370 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 251 1991
5,170,156 Multi-frequency two dimensional display system 256 1991
5,192,946 Digitized color video display system 326 1991
5,214,419 Planarized true three dimensional display 259 1991
5,214,420 Spatial light modulator projection system with random polarity light 300 1991
5,206,629 Spatial light modulator and memory for digitized video display 252 1991
5,179,274 Method for controlling operation of optical systems and devices 233 1991
5,168,406 Color deformable mirror device and method for manufacture 284 1991
5,254,980 DMD display system controller 243 1991
5,563,398 Spatial light modulator scanning system 205 1991
5,233,385 White light enhanced color field sequential projection 378 1991
5,233,456 Resonant mirror and method of manufacture 305 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 382 1992
5,331,454 Low reset voltage process for DMD 350 1992
5,296,950 Optical signal free-space conversion board 231 1992
5,231,532 Switchable resonant filter for optical radiation 247 1992
5,212,582 Electrostatically controlled beam steering device and method 347 1992
5,312,513 Methods of forming multiple phase light modulators 279 1992
5,172,262 Spatial light modulator and method 389 1992
5,305,640 Digital flexure beam accelerometer 192 1992
5,446,479 Multi-dimensional array video processor system 254 1992
5,818,095 High-yield spatial light modulator with light blocking layer 311 1992
5,272,473 Reduced-speckle display system 289 1992
5,327,286 Real time optical correlation system 276 1992
5,287,096 Variable luminosity display system 273 1992
5,325,116 Device for writing to and reading from optical storage media 257 1992
5,280,277 Field updated deformable mirror device 335 1992
5,506,597 Apparatus and method for image projection 286 1992
5,457,566 DMD scanner 244 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 353 1993
5,461,411 Process and architecture for digital micromirror printer 302 1993
5,323,002 Spatial light modulator based optical calibration system 279 1993
5,489,952 Method and device for multi-format television 334 1993
5,365,283 Color phase control for projection display using spatial light modulator 287 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 411 1993
5,581,272 Signal generator for controlling a spatial light modulator 199 1993
5,457,493 Digital micro-mirror based image simulation system 329 1993
5,411,769 Method of producing micromechanical devices 264 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 292 1993
5,526,051 Digital television system 267 1993
5,459,602 Micro-mechanical optical shutter 220 1993
5,452,024 DMD display system 424 1993
5,497,197 System and method for packaging data into video processor 235 1993
5,517,347 Direct view deformable mirror device 307 1993
5,583,688 Multi-level digital micromirror device 469 1993
5,448,314 Method and apparatus for sequential color imaging 413 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 278 1994
5,606,441 Multiple phase light modulation using binary addressing 225 1994
5,444,566 Optimized electronic operation of digital micromirror devices 361 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 303 1994
5,526,688 Digital flexure beam accelerometer and method 212 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 285 1994
6,061,075 Non-systolic time delay and integration printing 185 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 314 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 284 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 264 1994
5,548,301 Pixel control circuitry for spatial light modulator 254 1994
5,650,881 Support post architecture for micromechanical devices 264 1994
5,552,924 Micromechanical device having an improved beam 249 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 205 1994
5,659,374 Method of repairing defective pixels 209 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 245 1995
6,049,317 System for imaging of light-sensitive media 258 1995
5,610,438 Micro-mechanical device with non-evaporable getter 298 1995
5,515,076 Multi-dimensional array video processor system 250 1995
6,232,936 DMD Architecture to improve horizontal resolution 215 1995
5,535,047 Active yoke hidden hinge digital micromirror device 470 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 239 1995
5,619,366 Controllable surface filter 234 1995
5,551,293 Micro-machined accelerometer array with shield plane 225 1995
5,570,135 Method and device for multi-format television 231 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 279 1995
5,597,736 High-yield spatial light modulator with light blocking layer 251 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 410 1995
5,608,468 Method and device for multi-format television 251 1995
5,610,625 Monolithic spatial light modulator and memory package 188 1995
5,646,768 Support posts for micro-mechanical devices 308 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 225 1995
6,099,132 Manufacture method for micromechanical devices 211 1995
6,447,126 Support post architecture for micromechanical devices 330 1995
5,657,099 Color phase control for projection display using spatial light modulator 211 1995
5,654,741 Spatial light modulator display pointing device 196 1995
5,784,212 Method of making a support post for a micromechanical device 238 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 289 1996
5,842,088 Method of calibrating a spatial light modulator printing system 261 1997
5,808,780 Non-contacting micromechanical optical switch 234 1997
5,912,758 Bipolar reset for spatial light modulators 208 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 196 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 293 1998
6,282,010 Anti-reflective coatings for spatial light modulators 294 1999
6,323,982 Yield superstructure for digital micromirror device 266 1999
6,295,154 Optical switching apparatus 301 1999
6,147,790 Spring-ring micromechanical device 243 1999
6,038,056 Spatial light modulator having improved contrast ratio 266 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 196 2000
6,635,919 High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications 119 2000
6,376,787 Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer 157 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 216 2000
6,552,840 Electrostatic efficiency of micromechanical devices 239 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 218 2000
6,657,832 Mechanically assisted restoring force support for micromachined membranes 186 2001
6,778,155 Display operation with inserted block clears 185 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 225 2001
6,775,174 Memory architecture for micromirror cell 184 2001
6,625,047 Micromechanical memory element 259 2001
6,741,503 SLM display data address mapping for four bank frame buffer 184 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (57)
5,835,255 Visible spectrum modulator arrays 516 1994
6,040,937 Interferometric modulation 649 1996
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6,674,562 Interferometric modulation of radiation 691 1998
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7,123,216 Photonic MEMS and structures 559 1999
6,589,625 Hermetic seal and method to create the same 295 2001
6,867,896 Interferometric modulation of radiation 401 2001
6,680,792 Interferometric modulation of radiation 523 2001
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6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 400 2002
6,710,908 Controlling micro-electro-mechanical cavities 353 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 467 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 293 2002
7,110,158 Photonic MEMS and structures 180 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 289 2002
6,747,800 Optical interference type panel and the manufacturing method thereof 149 2003
6,912,022 Optical interference color display and optical interference modulator 244 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 106 2003
6,982,820 Color changeable pixel 159 2003
7,012,726 MEMS devices with unreleased thin film components 76 2003
7,198,973 Method for fabricating an interference display unit 102 2003
6,995,890 Interference display unit 130 2003
2004/0209,195 Method for fabricating an interference display unit 223 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 200 2003
6,882,458 Structure of an optical interference display cell 244 2003
2004/0240,032 Interferometric modulation of radiation 308 2004
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7,119,945 Altering temporal response of microelectromechanical elements 137 2004
* 7,078,293 Method for fabricating optical interference display cell 59 2004
6,958,847 Structure of an optical interference display unit 210 2004
6,999,225 Optical interference display panel 123 2004
* 7,193,768 Interference display cell 24 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 208 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 234 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 229 2004
6,952,303 Interferometric modulation pixels and manufacturing method thereof 199 2004
2005/0195,462 Interference display plate and manufacturing method thereof 242 2004
2006/0066,932 Method of selective etching using etch stop layer 70 2005
* 7,289,256 Electrical characterization of interferometric modulators 13 2005
2006/0077,503 System and method of providing MEMS device with anti-stiction coating 27 2005
7,446,926 System and method of providing a regenerating protective coating in a MEMS device 20 2005
7,547,565 Method of manufacturing optical interference color display 13 2005
2006/0177,950 Method of manufacturing optical interferance color display 16 2005
* 2006/0077,152 Device and method for manipulation of thermal response in a modulator 48 2005
7,492,502 Method of fabricating a free-standing microstructure 12 2005
2006/0077,529 Method of fabricating a free-standing microstructure 22 2005
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2006/0256,420 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 29 2006
* 2006/0257,070 Optical interference display cell and method of making the same 20 2006
* 2008/0026,328 METHOD FOR FABRICATING A STRUCTURE FOR A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE 36 2007
2007/0269,748 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATORS 31 2007
2008/0068,699 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATROS 27 2007
2009/0022,884 SYSTEM AND METHOD FOR MICRO-ELECTROMECHANICAL OPERATION OF AN INTERFEROMETRIC MODULATOR 17 2008
2009/0323,168 ELECTROMECHANICAL DEVICES AND METHODS OF FABRICATING SAME 17 2009
 
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2003/0202,264 Micro-mirror device 205 2002
6,747,785 MEMS-actuated color light modulator and methods 218 2002
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2004/0147,056 Micro-fabricated device and method of making 194 2003
6,829,132 Charge control of micro-electromechanical device 217 2003
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2005/0068,583 Organizing a digital image 181 2003
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Hoechst Aktiengesellschaft (1)
4,392,711 Process and apparatus for rendering visible charge images 123 1981
 
INFINEON TECHNOLOGIES AG (1)
2003/0003,682 Method for manufacturing an isolation trench filled with a high-density plasma-chemical vapor deposition oxide 31 2002
 
INTEGRATED MEDICAL SYSTEMS, INC. (1)
6,115,326 Ultrasonic micro-machined selectable transducer array 49 1998
 
INTELLECTUAL DISCOVERY CO., LTD. (1)
6,392,781 High speed semiconductor optical modulator and fabricating method thereof 62 2000
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 299 1999
 
JOHN MCGAVIGAN AUTOMOTIVE ELECTRONICS LIMITED (1)
6,158,156 Display panels 114 1998
 
KODAK I L, LTD. (1)
6,618,187 Blazed micro-mechanical light modulator and array thereof 54 2001
 
LENOVO (SINGAPORE) PTE LTD. (1)
6,377,233 Micromechanical display and fabrication method 113 2001
 
LSI LOGIC CORPORATION (1)
6,166,422 Inductor with cobalt/nickel core for integrated circuit structure with high inductance and high Q-factor 78 1998
 
M-Squared Filters, LLC (1)
6,452,465 High quality-factor tunable resonator 145 2000
 
MAGNACHIP SEMICONDUCTOR, LTD. (1)
6,246,398 Application specific integrated circuit (ASIC) for driving an external display device 58 1998
 
MAPLE VISION TECHNOLOGIES INC. (1)
6,204,080 Method for manufacturing thin film actuated mirror array in an optical projection system 85 1998
 
MEMTRONICS, A DIVISION OF COGENT SOLUTIONS, INC. (1)
6,608,268 Proximity micro-electro-mechanical system 182 2002
 
MINOLTA CO., LTD. (1)
2002/0027,636 Non-flat liquid crystal display element and method of producing the same 93 2001
 
MITSUBISHI DENKI KABUSHIKI KAISHA (1)
5,650,834 Active-matrix device having silicide thin film resistor disposed between an input terminal and a short-circuit ring 103 1994
 
MITSUBISHI JIDOSHA KOGYO K.K. (A.K.A. MITSUBISHI MOTORS CORPORATION) (1)
5,647,819 Speed change control method for an automatic transmission 51 1995
 
MOTOROLA, INC. (1)
5,044,736 Configurable optical filter or display 220 1990
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
* 5,619,059 Color deformable mirror device having optical thin film interference color coatings 232 1994
 
NEW VISUAL MEDIA GROUP, L.L.C. (1)
5,638,084 Lighting-independent color video display 222 1996
 
Nippondenso Co., Ltd. (1)
5,824,608 Semiconductor physical-quantity sensor and method for manufacturing same 64 1996
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 205 2001
 
North American Philips Corporation (1)
4,900,136 Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel 145 1988
 
Northrop Corporation (1)
5,153,771 Coherent light modulation and detector 180 1990
 
NORTHROP GRUMMAN SYSTEMS CORPORATION (1)
5,793,504 Hybrid angular/spatial holographic multiplexer 148 1996
 
NORTHWESTERN UNIVERSITY (1)
5,638,946 Micromechanical switch with insulated switch contact 390 1996
 
OCEAN POWER TECHNOLOGIES, INC. (1)
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RAYTHEON COMPANY (1)
6,391,675 Method and apparatus for switching high frequency signals 76 1999
 
RESEARCH TRIANGLE INSTITUTE (1)
6,456,420 Microelectromechanical elevating structures 101 2000
 
ROCKSTAR CONSORTIUM US LP (1)
5,629,790 Micromachined torsional scanner 577 1993
 
ROUND ROCK RESEARCH, LLC (1)
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ROYAL BANK CAPITAL PARTNERS (1)
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SAMSUNG DISPLAY CO., LTD. (1)
5,674,757 Process of fabricating a self-aligned thin-film transistor for a liquid crystal display 65 1995
 
SANWA BANK CALIFORNIA (1)
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6,392,233 Optomechanical radiant energy detector 67 2000
 
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Societe d'Etude du Radant (1)
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SONY CORPORATION (1)
5,355,357 Disc player and disc loading device 173 1992
 
Sperry Marine Inc. (1)
5,136,669 Variable ratio fiber optic coupler optical signal processing element 133 1991
 
SUMITOMO CHEMICAL COMPANY, LIMITED (1)
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Techbank Corporation (1)
6,736,987 Silicon etching apparatus using XeF2 49 2000
 
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6,602,791 Manufacture of integrated fluidic devices 68 2001
 
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5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 234 1991
 
TOPPOLY OPTOELECTRONICS CORP. (1)
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Other [Check patent profile for assignment information] (14)
4,445,050 Device for conversion of light power to electric power 193 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 180 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 273 1991
5,228,013 Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays 137 1992
5,526,327 Spatial displacement time display 140 1994
5,500,635 Products incorporating piezoelectric material 292 1994
5,641,391 Three dimensional microfabrication by localized electrodeposition and etching 149 1995
5,822,110 Reflective light valve modulator 80 1997
* 5,896,796 Device for punching holes in a bicycle rim 32 1997
* 2003/0104,693 USE OF FLUOROPOLYMER COATING FOR PLANARIZING AND PASSIVATING INTEGRATED CIRCUIT DEVICES 9 2001
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 248 2003
2005/0001,828 Charge control of micro-electromechanical device 183 2004
2005/0014,374 Gap tuning for surface micromachined structures in an epitaxial reactor 61 2004
* 2005/0170,670 Patterning of sacrificial materials 36 2004
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (4)
8,547,626 Mechanical layer and methods of shaping the same 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,817,357 Mechanical layer and methods of forming the same 0 2011
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
* Cited By Examiner

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