Method of creating MEMS device cavities by a non-etching process

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7795061
APP PUB NO 20070155051A1
SERIAL NO

11321134

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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MEMS devices (such as interferometric modulators) may be fabricated using a sacrificial layer that contains a heat vaporizable polymer to form a gap between a moveable layer and a substrate. One embodiment provides a method of making a MEMS device that includes depositing a polymer layer over a substrate, forming an electrically conductive layer over the polymer layer, and vaporizing at least a portion of the polymer layer to form a cavity between the substrate and the electrically conductive layer. Another embodiment provides a method for making an interferometric modulator that includes providing a substrate, depositing a first electrically conductive material over at least a portion of the substrate, depositing a sacrificial material over at least a portion of the first electrically conductive material, depositing an insulator over the substrate and adjacent to the sacrificial material to form a support structure, and depositing a second electrically conductive material over at least a portion of the sacrificial material, the sacrificial material being removable by heat-vaporization to thereby form a cavity between the first electrically conductive layer and the second electrically conductive layer.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
SNAPTRACK, INC.SAN JOSE, CA1439

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lan, Jeffrey Cupertino, US 2 23
Sasagawa, Teruo Los Gatos, US 66 1188
Wang, Chun-Ming Fremont, US 51 836

Cited Art Landscape

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7012726 MEMS devices with unreleased thin film components 94 2003
7198973 Method for fabricating an interference display unit 118 2003
6995890 Interference display unit 138 2003
2004/0209,195 Method for fabricating an interference display unit 237 2003
6870654 Structure of a structure release and a method for manufacturing the same 216 2003
6882458 Structure of an optical interference display cell 262 2003
2004/0240,032 Interferometric modulation of radiation 327 2004
* 6999236 Optical-interference type reflective panel and method for making the same 99 2004
7119945 Altering temporal response of microelectromechanical elements 154 2004
* 7078293 Method for fabricating optical interference display cell 62 2004
6958847 Structure of an optical interference display unit 225 2004
6999225 Optical interference display panel 134 2004
* 7193768 Interference display cell 25 2004
2005/0042,117 Optical interference display panel and manufacturing method thereof 174 2004
6882461 Micro electro mechanical system display cell and method for fabricating thereof 224 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 250 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 248 2004
6952303 Interferometric modulation pixels and manufacturing method thereof 214 2004
2005/0195,462 Interference display plate and manufacturing method thereof 258 2004
2006/0066,932 Method of selective etching using etch stop layer 70 2005
* 7289256 Electrical characterization of interferometric modulators 16 2005
2006/0077,503 System and method of providing MEMS device with anti-stiction coating 30 2005
7446926 System and method of providing a regenerating protective coating in a MEMS device 29 2005
7547565 Method of manufacturing optical interference color display 21 2005
2006/0177,950 Method of manufacturing optical interferance color display 16 2005
* 2006/0077,152 Device and method for manipulation of thermal response in a modulator 49 2005
7492502 Method of fabricating a free-standing microstructure 13 2005
2006/0077,529 Method of fabricating a free-standing microstructure 25 2005
* 2006/0066,511 Systems and methods using interferometric optical modulators and diffusers 43 2005
* 7259865 Process control monitors for interferometric modulators 22 2005
2006/0256,420 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 29 2006
* 2006/0257,070 Optical interference display cell and method of making the same 20 2006
* 2008/0026,328 METHOD FOR FABRICATING A STRUCTURE FOR A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE 36 2007
2007/0269,748 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATORS 31 2007
2008/0068,699 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATROS 30 2007
2009/0022,884 SYSTEM AND METHOD FOR MICRO-ELECTROMECHANICAL OPERATION OF AN INTERFEROMETRIC MODULATOR 17 2008
2009/0323,168 ELECTROMECHANICAL DEVICES AND METHODS OF FABRICATING SAME 17 2009
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5311360 Method and apparatus for modulating a light beam 599 1992
5459610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 323 1993
 
BOURNS, INC. (1)
6249039 Integrated inductive components and method of fabricating such components 152 1998
 
HONEYWELL INTERNATIONAL INC. (2)
6215221 Electrostatic/pneumatic actuators for active surfaces 172 1998
6288472 Electrostatic/pneumatic actuators for active surfaces 116 2000
 
CP CLARE (1)
6297072 Method of fabrication of a microstructure having an internal cavity 243 1999
 
HONEYWELL INC. (3)
4377324 Graded index Fabry-Perot optical filter device 252 1980
5559358 Opto-electro-mechanical device or filter, process for making, and sensors made therefrom 390 1994
5822170 Hydrophobic coating for reducing humidity effect in electrostatic actuators 160 1997
 
FSI INTERNATIONAL, INC. (1)
4900395 HF gas etching of wafers in an acid processor 185 1989
 
CITIZEN HOLDINGS CO., LTD. (1)
* 6713235 Method for fabricating thin-film substrate and thin-film substrate fabricated by the method 58 2001
 
CHROMISYS (1)
2002/0071,169 Micro-electro-mechanical-system (MEMS) mirror device 115 2000
 
North American Philips Corporation (1)
4900136 Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel 155 1988
 
EASTMAN KODAK COMPANY (4)
5075796 Optical article for multicolor imaging 220 1990
5347377 Planar waveguide liquid crystal variable retarder 91 1992
6284560 Method for producing co-planar surface structures 66 1998
6335831 Multilevel mechanical grating device 101 1998
 
FAHRENHEIT THERMOSCOPE LLC (1)
5330617 Method for etching integrated-circuit layers to a fixed depth and corresponding integrated circuit 45 1991
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (3)
4389096 Image display apparatus of liquid crystal valve projection type 294 1981
5622814 Method for fabricating active substrate 115 1994
6952304 Variable mirror and information apparatus comprising variable mirror 54 2002
 
AT&T CORP. (1)
5500761 Micromechanical modulator 355 1994
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
SNAPTRACK, INC. (8)
8547626 Mechanical layer and methods of shaping the same 0 2010
8358458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
* 2011/0051,224 LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED ADHESION IN MEMS DEVICES 0 2010
* 2011/0058,243 METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES 7 2010
9134527 Pixel via and methods of forming the same 1 2011
8963159 Pixel via and methods of forming the same 1 2011
8817357 Mechanical layer and methods of forming the same 2 2011
8830557 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2012
* Cited By Examiner

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