Aberration measurement apparatus and aberration measurement method
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United States of America Patent
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Sep 14, 2010
Grant Date -
Jan 8, 2009
app pub date -
Mar 6, 2008
filing date -
Mar 8, 2007
priority date (Note) -
Expired
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Abstract
An aberration measurement apparatus measures the aberration of an imaging optical system. The apparatus includes an illumination system, a separation member, and a measurement unit. The illumination system supplies the imaging optical system with measurement light used to measure an aberration of the imaging optical system and background light different from the measurement light. The separation member separates the measurement light and the background light which have passed through the imaging optical system. The measurement unit measures the aberration of the imaging optical system on the basis of the measurement light separated by the separation member.
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