Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool
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United States of America Patent
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Sep 21, 2010
Grant Date -
Nov 8, 2007
app pub date -
May 5, 2006
filing date -
May 5, 2006
priority date (Note) -
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Abstract
A batch processing chamber includes a chamber housing, a substrate boat for containing a batch of substrates in a process region, and an excitation assembly for exciting species of a processing gas. The excitation assembly is positioned within the chamber housing and may include plasma, UV, or ion assistance.
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