Microelectronic multiple electron beam emitting device
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United States of America Patent
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Sep 21, 2010
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N/A
app pub date -
Jan 24, 2006
filing date -
Jan 27, 2005
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Abstract
An electronic emission device emitting plural beams of electrons and including a first structure of a plurality of electron beam emission micro-sources, and a second structure opposite the first structure for collecting electrons emitted by the first structure and for carrying out a secondary emission following the collection. The device can be applied in particular to the field of direct writing lithography.
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