Manufacturing process for thin film bulk acoustic resonator (FBAR) filters
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United States of America Patent
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Sep 28, 2010
Grant Date -
Jun 11, 2009
app pub date -
May 15, 2007
filing date -
Mar 7, 2003
priority date (Note) -
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Abstract
Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material. The filled depression has an upper surface level with said top surface of said substrate. Next, a first electrode is deposited on said upper surface. Then, a layer of piezoelectric material is deposited on said first electrode. A second electrode is deposited on the layer of piezoelectric material using a mass load lift-off process.
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