Dense non-volatile memory array and method of fabrication
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United States of America Patent
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Sep 28, 2010
Grant Date -
Mar 1, 2007
app pub date -
Jul 18, 2006
filing date -
Jul 18, 2005
priority date (Note) -
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Abstract
A non-volatile memory array has word lines spaced a sub-F (sub-minimum feature size F) width apart and bit lines generally perpendicular to the word lines. The present invention also includes a method for word-line patterning of a non-volatile memory array which includes generating sub-F word lines from mask generated elements with widths of at least a minimum feature size F.
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