Capacitive distance sensing in semiconductor processing tools
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United States of America Patent
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Sep 28, 2010
Grant Date -
Sep 27, 2007
app pub date -
Feb 20, 2007
filing date -
Feb 21, 2006
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Abstract
A wireless sensor includes at least one capacitive plate for sensing a distance relative to an object of interest within a semiconductor-processing environment. The sensor includes an internal power source and wireless communication such that distance and/or parallelism measurements effected using the capacitive plate(s) can be provided wirelessly to an external device.
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