Etching apparatus for use in manufacture of flat panel display device and manufacturing method using the same
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United States of America Patent
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Oct 5, 2010
Grant Date -
Jul 5, 2007
app pub date -
Jun 20, 2006
filing date -
Dec 29, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
Disclosed herein are an apparatus and method for manufacturing a flat panel display device. The apparatus and method for manufacturing a flat panel display device contribute to a compact apparatus for etching a substrate and damage or breakage prevention of the substrate during the transfer of the substrate by virtue of stoppers. The etching apparatus comprises a loader for loading or unloading a substrate, an etching device for etching the substrate into a desired shape, a DI rinsing device for rinsing fine particles and etchant generated during the etching process from the etched substrate, an air knife for drying the rinsed substrate, and one or more turn stages provided at one or more locations between the above respective devices, and adapted to change a transfer direction of the substrate.
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