Method for fast filling of templates for imprint lithography using on template dispense

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7811505
APP PUB NO 20060121728A1
SERIAL NO

11101140

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A method of depositing material upon a substrate features filling recesses of a substrate with liquid and removing material present on the substrate, outside of the recesses using fluid, i.e., apply a vacuum of a jet of fluid. To that end, one method of the present invention includes depositing a measure of liquid upon a surface of a substrate having a recess formed therein to ingress into a volume of the recess with a portion of the liquid. A quantity of the liquid is disposed upon regions of the surface proximate to the recess. Thereafter, the quantity of liquid is removed while maintaining the portion within the volume. In this manner, the portion may be transferred onto an additional substrate. More specifically, the portion may be placed in contact with a layer of flowable material and cross-linking therewith by exposing the liquid and the flowable material to actinic radiation.

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First Claim

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Patent Owner(s)

  • MOLECULAR IMPRINTS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lad, Pankaj B Austin, US 26 874
McMackin, Ian M Austin, US 30 1003
Truskett, Van N Austin, US 18 535

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