Method and apparatus for refining boron-containing silicon using an electron beam
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United States of America Patent
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Oct 19, 2010
Grant Date -
Jun 15, 2006
app pub date -
Sep 23, 2005
filing date -
Sep 27, 2004
priority date (Note) -
Expired
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Abstract
In a refining method for boron-containing silicon, boron-containing silicon is irradiated with an electron beam in a vacuum vessel to melt the boron-containing silicon. A boron compound-forming substance is introduced into the vacuum vessel, and boron contained in the molten silicon is formed into a boron compound. After at least a portion of the boron compound has vaporized, irradiation with the electron beam is stopped. The high-purity molten silicon can then be solidified.
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