MEMS processing
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United States of America Patent
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Oct 19, 2010
Issued Date -
N/A
app pub date -
Dec 1, 2006
filing date -
Dec 1, 2006
priority date (Note) -
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Abstract
Methods for forming a MEMS display device are provided. In one embodiment, a transparent substrate comprising an array of MEMS devices (e.g., interferometric modulators) formed thereon is annealed following removal of a sacrificial silicon layer. The array is subsequently encapsulated with a backplate comprising a desiccant. MEMS devices disposed below the desiccant have an offset voltage substantially equal to zero.
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