Leak inspection method and leak inspector
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United States of America Patent
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Oct 19, 2010
Grant Date -
May 21, 2009
app pub date -
May 24, 2007
filing date -
May 24, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
In a calibration mode, an equilibrium period after pressurized gas is sealed in a device under inspection and a reference tank is divided into two periods; pressure-difference changes .DELTA.P1 and .DELTA.P2 are measured when a first-half equilibrium period of duration T1 elapses and when a second-half equilibrium period of duration T1 elapses, respectively; and a pressure-difference change .DELTA.P3 generated in an inspection period of duration T2 is measured. A pressure-difference change CT2 generated for duration T2 from when a period of time in which the influence of an adiabatic change seems to become sufficiently stable elapses is measured. A drift correction coefficient K is calculated from these measured values using K=(.DELTA.P3-CT2)/(.DELTA.P1-.DELTA.P2), is stored in a storage section, and is used in an inspection mode.
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