Silicon wafer and method for manufacturing the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7824493
SERIAL NO

11184869

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method for manufacturing a silicon wafer includes a step of annealing a silicon wafer which is sliced from a silicon single crystal ingot, thereby forming a DZ layer in a first surface and in a second surface of the silicon wafer and a step of removing either a portion of the DZ layer in the first surface or a portion of the DZ layer in the second surface.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • SUMITOMO MITSUBISHI SILICON CORPORATION

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hourai, Masataka Tokyo, JP 46 290
Ono, Toshiaki Tokyo, JP 125 933
Sugimura, Wataru Tokyo, JP 33 133

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation