Non-aqueous microelectronic cleaning compositions containing fructose
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United States of America Patent
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Nov 2, 2010
Grant Date -
Nov 20, 2008
app pub date -
Feb 1, 2005
filing date -
Jul 15, 2004
priority date (Note) -
Expired
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Abstract
Back end photoresist strippers and residue compositions are provided by non-aqueous compositions that are essentially non-corrosive toward copper as well as aluminum and that comprise a polar organic solvent, a hydroxylated amine, and as a corrosion inhibitor fructose.
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