Radiation beam pulse trimming

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7826037
SERIAL NO

11847928

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam splitter. The radiation source is configured to generate a polarized beam of radiation. The electro-optical modulator, formed of crystalline quartz, is configured to modulate the beam of radiation. The beam splitter is configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
De, Bruijn Cornelis Cornelia Sprundel, NL 2 4
Meijerink, Marcus Gerhardus Hendrikus The Hague, NL 6 51
Noordman, Oscar Franciscus Jozephus Eindhoven, NL 14 59
Schreel, Koenraad Remi André Maria Veldhoven, NL 6 11
Vink, Henri Johannes Petrus The Hague, NL 13 80
Visser, Huibert Zevenhuizen, NL 31 616

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation