Miniature RF and microwave components and methods for fabricating such components
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United States of America Patent
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Nov 9, 2010
Issued Date -
N/A
app pub date -
Aug 21, 2007
filing date -
Dec 3, 2001
priority date (Note) -
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Abstract
RF and microwave radiation directing or controlling components are provided that may be monolithic, that may be formed from a plurality of electrodeposition operations and/or from a plurality of deposited layers of material, that may include switches, inductors, antennae, transmission lines, filters, and/or other active or passive components. Components may include non-radiation-entry and non-radiation-exit channels that are useful in separating sacrificial materials from structural materials. Preferred formation processes use electrochemical fabrication techniques (e.g. including selective depositions, bulk depositions, etching operations and planarization operations) and post-deposition processes (e.g. selective etching operations and/or back filling operations).
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