Alignment features in a probing device

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United States of America Patent

PATENT NO 7834647
APP PUB NO 20100066397A1
SERIAL NO

12502875

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An image of an array of probes is searched for alignment features. The alignment features are then used to bring contact targets and the probes into contact with one another. The alignment features may be a feature of one or more of the tips of the probes. For example, such a feature may be a corner of one of the tips. An array of probes may be formed to have such alignment features.

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Patent Owner(s)

  • FORMFACTOR, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Tae Ma Livermore, US 5 77
Nagai, Bunsaki Tokyo, JP 2 4

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