Optical method for controlling thin film growth

United States of America Patent

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Nov 16, 2010
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Jun 21, 2007
app pub date
Feb 12, 2007
filing date
Sep 14, 2001

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Abstract

of the turning point in the transmission spectrum of thin-film at its optical design thickness, and interrupting the growth process such that growth ceases at time T.

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Patent Owner	Address
CHEMTRON RESEARCH LLC	251 LITTLE FALLS DRIVE WILMINGTON DE 19808

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G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....

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Inventor Name	Address	# of filed Patents	Total Citations
Flynn, Colin James	Worcestershire, GB	2	2

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Optical method for controlling thin film growth

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United States of America Patent

11705301

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PATENT NO	7835018
APP PUB NO	20070141734A1
SERIAL NO	11705301
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
November 16, 2010	US,7835018,B2 US7835018B2	GRANTED PATENT AS SECOND PUBLICATION
June 21, 2007	US,20070141734,A1 US20070141734A1	FIRST PUBLISHED PATENT APPLICATION

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