Silicon single crystal wafer for particle monitor
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United States of America Patent
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Nov 23, 2010
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app pub date -
May 23, 2008
filing date -
Aug 27, 2002
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Abstract
for the particles having a diameter of not less than 0.12 mum even after repeating the SC-1. Hence, a high quality wafer optimally used for a particle monitor can be obtained and a very small number of defects in the wafer make it possible to produce devices.
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