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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
APPLIED MATERIALS INC	3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Chang, Mei	Saratoga, US	279	30427
Gelatos, Avgerinos V	Redwood City, US	94	3259
Khandelwal, Amit	Santa Clara, US	23	1924
Marcadal, Christophe	Santa Clara, US	50	5903

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
November 23, 2010	US,7838441,B2   US7838441B2	GRANTED PATENT AS SECOND PUBLICATION
November 12, 2009	US,20090280640,A1   US20090280640A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7838441

Deposition and densification process for titanium nitride barrier layers

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