Laser-based method and system for removing one or more target link structures

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7838794
APP PUB NO 20070199927A1
SERIAL NO

11700386

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Laser-based methods and systems for removing one or more target link structures of a circuit fabricated on a substrate includes generating a pulsed laser output at a predetermined wavelength less than an absorption edge of the substrate are provided. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target link structure to reduce the reflectivity of the target link structure and efficiently couple the focused laser output into the target link structure to remove the target link structure without damaging the substrate.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ELECTRO SCIENTIFIC INDUSTRIES, INC.PORTLAND, OR422

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cordingley, James J Littleton, US 40 1002
Ehrmann, Jonathan S Sudbury, US 71 1428
Gu, Bo North Andover, US 30 565
Johnson, Shepard D Andover, US 33 658
Lee, Joohan Andover, US 22 489
Smart, Donald V Boston, US 52 1730
Svetkoff, Donald J Ann Arbor, US 57 2104

Cited Art Landscape

Patent Info (Count) # Cites Year
 
SCIENCE & TECHNOLOGY DEVELOPMENT CORPORATION @ UNM (1)
5175664 Discharge of lightning with ultrashort laser pulses 40 1991
 
Other [Check patent profile for assignment information] (7)
5280491 Two dimensional scan amplifier laser 37 1991
5524018 Superior resolution laser using bessel transform optical filter 23 1994
5848080 Short pulsewidth high pulse repetition frequency laser 35 1997
6210401 Method of, and apparatus for, surgery of the cornea 174 1998
* 6482199 Method and apparatus for high precision variable rate material, removal and modification 83 2000
6552301 Burst-ultrafast laser machining method 84 2001
7050208 Scanning microscopy, fluorescence detection, and laser beam positioning 23 2002
 
GENERAL ATOMICS (1)
6664498 Method and apparatus for increasing the material removal rate in laser machining 58 2002
 
New Wave Research (1)
5811751 Multi-wavelength laser system, probe station and laser cutter system using the same 141 1997
 
PANASONIC CORPORATION OF NORTH AMERICA (1)
5786560 3-dimensional micromachining with femtosecond laser pulses 133 1997
 
MICROLINE TECHNOLOGIES, INC. (1)
5759428 Method of laser cutting a metal line on an MR head 39 1996
 
STC PLC, A BRITISH COMPANY (1)
4602852 Acousto-optic deflector systems 27 1984
 
ORBOTECH LTD. (1)
6689985 Laser drill for use in electrical circuit fabrication 21 2001
 
NANYANG TECHNOLOGICAL UNIVERSITY (1)
6285002 Three dimensional micro machining with a modulated ultra-short laser pulse 117 1999
 
Clark-MXR, Inc. (1)
5592327 Regenerative amplifier incorporating a spectral filter within the resonant cavity 106 1995
 
HITACHI, LTD. (1)
5208437 Method of cutting interconnection pattern with laser and apparatus thereof 62 1991
 
Inmos Corporation (2)
4826785 Metallic fuse with optically absorptive layer 43 1987
4935801 Metallic fuse with optically absorptive layer 45 1989
 
AISIN SEIKI KABUSHIKI KAISHA (2)
5920668 Compact fiber laser unit 54 1997
6208458 Quasi-phase-matched parametric chirped pulse amplification systems 132 1998
 
Sandia Corporation (1)
5864430 Gaussian beam profile shaping apparatus, method therefor and evaluation thereof 77 1996
 
ETHICON, INC. (1)
6252195 Method of forming blind holes in surgical needles using a diode pumped Nd-YAG laser 32 1999
 
ELECTRO SCIENTIFIC INDUSTRIES, INC. (65)
5197074 Multi-function intra-resonator loss modulator and method of operating same 58 1991
5265114 System and method for selectively laser processing a target structure of one or more materials of a multimaterial, multilayer device 76 1992
5463200 Marking of a workpiece by light energy 75 1993
5521628 Laser system for simultaneously marking multiple parts 26 1993
5473624 Laser system and method for selectively severing links 45 1994
5569398 Laser system and method for selectively trimming films 76 1994
5685995 Method for laser functional trimming of films and devices 45 1995
5751585 High speed, high accuracy multi-stage tool positioning system 113 1996
5841099 Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets 131 1996
5837962 Faster laser marker employing acousto-optic deflection 84 1996
5847960 Multi-tool positioning system 81 1996
5998759 Laser processing 89 1996
6025256 Laser based method and system for integrated circuit repair or reconfiguration 43 1997
6057180 Method of severing electrically conductive links with ultraviolet laser output 146 1998
6339604 Pulse control in laser systems 68 1998
6181728 Controlling laser polarization 102 1998
6144118 High-speed precision positioning apparatus 84 1998
6300590 Laser processing 39 1998
6172325 Laser processing power output stabilization apparatus and method employing processing position feedback 76 1999
6341029 Method and apparatus for shaping a laser-beam intensity profile by dithering 44 1999
6281471 Energy-efficient, laser-based method and system for processing target material 173 1999
6462306 System and method for material processing using multiple laser beams 48 2000
6501061 Laser calibration apparatus and method 42 2000
6483071 Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site 57 2000
6433301 Beam shaping and projection imaging with solid state UV Gaussian beam to form vias 81 2000
6340806 Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train 112 2000
6574250 Laser system and method for processing a memory link with a burst of laser pulses having ultrashort pulse widths 169 2001
6495791 Method and subsystem for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site 28 2001
6662063 Method and subsystem for determining a sequence in which microstructures are to be processed at a laser-processing site 36 2001
6727458 Energy-efficient, laser-based method and system for processing target material 79 2001
2002/0063,361 Laser processing of alumina or metals on or embedded therein 24 2001
6573473 Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site 25 2001
6703582 Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train 44 2002
6639177 Method and system for processing one or more microstructures of a multi-material device 34 2002
6777645 High-speed, precision, laser-based method and system for processing material of one or more targets within a field 37 2002
6972268 Methods and systems for processing a device, methods and systems for modeling same and the device 47 2002
7027155 Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure 27 2002
2002/0167,581 Methods and systems for thermal-based laser processing a multi-material device 99 2002
2003/0151,053 Processing a memory link with a set of at least two laser pulses 38 2002
6951995 Method and system for high-speed, precise micromachining an array of devices 42 2003
2003/0222,324 Laser systems for passivation or link processing with a set of laser pulses 21 2003
7015418 Method and system for calibrating a laser processing system and laser marking system utilizing same 60 2003
7119351 Method and system for machine vision-based feature detection and mark verification in a workpiece or wafer marking system 31 2003
2004/0188,399 Energy-efficient, laser-based method and system for processing target material 45 2004
6989508 High-speed, precision, laser-based method and system for processing material of one or more targets within a field 27 2004
7126746 Generating sets of tailored laser pulses 32 2004
2005/0279,739 Semiconductor structure processing using multiple laser beam spots spaced on-axis to increase single-blow throughput 21 2005
7176407 Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site 15 2005
7192846 Methods and systems for processing a device, methods and systems for modeling same and the device 16 2005
2006/0000,814 Laser-based method and system for processing targeted surface material and article produced thereby 30 2005
7358157 Method and system for high-speed precise laser trimming, scan lens system for use therein and electrical device produced thereby 11 2005
2006/0028,655 Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure 31 2005
2006/0108,337 Method and system for laser soft marking 13 2005
2006/0189,091 Method and system for laser hard marking 14 2005
2006/0086,702 Energy-efficient, laser-based method and system for processing target material 22 2005
7148447 Method and apparatus for laser marking by ablation 18 2006
2006/0199,354 Method and system for high-speed precise laser trimming and electrical device produced thereby 13 2006
2006/0205,121 Method and system for high-speed, precise micromachining an array of devices 22 2006
2007/0106,416 Method and system for adaptively controlling a laser-based material processing process and method and system for qualifying same 35 2006
2007/0215,820 Methods and systems for thermal-based laser processing a multi-material device 26 2006
2008/0094,640 Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method for controlling energy delivered to a target structure 33 2006
2007/0178,714 Method and system for high-speed precise laser trimming and scan lens for use therein 13 2007
2008/0073,438 Laser-based method and system for processing targeted surface material and article produced thereby 21 2007
2008/0035,614 ENERGY EFFICIENT, LASER-BASED METHOD AND SYSTEM FOR PROCESSING TARGET MATERIAL 18 2007
2008/0067,155 Method and system for laser processing targets of different types on a workpiece 22 2007
 
LASERFRONT TECHNOLOGIES, INC. (1)
6239406 Laser beam machining apparatus 31 1999
 
NORTHROP GRUMMAN CORPORATION (1)
4742522 Free-electron laser system with raman amplifier outcoupling 23 1987
 
LOCKHEED MARTIN CORPORATION (2)
4780177 Excimer laser patterning of a novel resist 112 1988
6541731 Use of multiple laser sources for rapid, flexible machining and production of vias in multi-layered substrates 77 2001
 
MRF, INC. (1)
5520679 Ophthalmic surgery method using non-contact scanning laser 211 1994
 
RAYTHEON COMPANY (1)
5974060 Multi-mode laser oscillator with large intermode spacing 69 1999
 
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC. (1)
5558789 Method of applying a laser beam creating micro-scale surface structures prior to deposition of film for increased adhesion 42 1994
 
CANON KABUSHIKI KAISHA (1)
5739590 Semiconductor device having improved surface evenness 19 1995
 
COUNCIL FOR THE CENTRAL LABORATORY OF THE RESEARCH COUNCIL (1)
5654998 Laser-excited X-ray source 24 1995
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (2)
4414059 Far UV patterning of resist materials 138 1982
5374590 Fabrication and laser deletion of microfuses 49 1993
 
NIKON CORPORATION (2)
6901090 Exposure apparatus with laser device 38 2000
6947123 Exposure device with laser device 21 2000
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (2)
5475527 Fourier plane image amplifier 18 1994
6421166 Compact, flexible, frequency agile parametric wavelength converter 30 2000
 
E. I. DU PONT DE NEMOURS AND COMPANY (2)
5293025 Method for forming vias in multilayer circuits 91 1991
5294567 Method for forming via holes in multilayer circuits 44 1993
 
McDonnell Douglas Corporation (1)
5694408 Fiber optic laser system and associated lasing method 141 1996
 
SPI LASERS UK LIMITED (1)
5812569 Stabilization of the output energy of a pulsed solid state laser 35 1997
 
CORNELL RESEARCH FOUNDATION, INC. (1)
5034951 Femtosecond ultraviolet laser using ultra-thin beta barium borate 42 1990
 
CHROMAPLEX, INC. (1)
2004/0057,475 High-power pulsed laser device 38 2002
 
GSI LUMONICS CORPORATION (8)
5300756 Method for severing integrated-circuit connection paths by a phase-plate-adjusted laser beam 62 1991
2004/0144,760 Method and system for marking a workpiece such as a semiconductor wafer and laser marker for use therein 17 2003
2005/0199,598 Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site 19 2005
2006/0186,096 High speed, laser-based marking method and system for producing machine readable marks on workpieces and semiconductor devices with reduced subsurface damage produced thereby 18 2006
2006/0207,975 High-speed, precision, laser-based method and system for processing material of one or more targets within a field 28 2006
2006/0216,927 Methods and systems for processing a device, methods and systems for modeling same and the device 16 2006
2007/0031,993 Method and system for machine vision-based feature detection and mark verification in a workpiece or wafer marking system 18 2006
2007/0075,058 High-speed, precision, laser-based method and system for processing material of one or more targets within a field 15 2006
 
SPECTRA-PHYSICS LASERS, INC. (1)
4646308 Synchronously pumped dye laser using ultrashort pump pulses 43 1985
 
KANEKA CORPORATION (1)
6324195 Laser processing of a thin film 53 1999
 
GSI GROUP INC (1)
5854805 Laser machining of a workpiece 40 1997
 
GSI GROUP CORPORATION (5)
2006/0151,704 Laser-based material processing methods, system and subsystem for use therein for precision energy control 16 2005
2006/0191,884 High-speed, precise, laser-based material processing method and system 28 2006
2007/0117,227 Method And System for Iteratively, Selectively Tuning A Parameter Of A Doped Workpiece Using A Pulsed Laser 18 2006
2007/0173,075 Laser-based method and system for processing a multi-material device having conductive link structures 16 2007
2007/0215,575 Method and system for high-speed, precise, laser-based modification of one or more electrical elements 14 2007
 
TERADYNE LASER SYSTEMS, INC., A MASSACHUSETTS CORP. (2)
4483005 Affecting laser beam pulse width 38 1981
4918284 Calibrating laser trimming apparatus 46 1988
 
QUICK TECHNOLOGIES LTD. (1)
5329152 Ablative etch resistant coating for laser personalization of integrated circuits 45 1992
 
Gazelle Microcircuits, Inc. (1)
4872140 Laser programmable memory array 24 1987
 
EHRENWALD, JERRY (1)
4467172 Method and apparatus for laser engraving diamonds with permanent identification markings 65 1983
 
AMO MANUFACTURING USA, LLC (1)
* 6099522 Automated laser workstation for high precision surgical and industrial interventions 232 1995
 
UNIVERSITY OF CENTRAL FLORIDA RESEARCH FOUNDATION, INC. (1)
2005/0215,985 Method of generating an ultra-short pulse using a high-frequency ring oscillator 29 2005
 
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. (1)
4861964 Laser scribing system and method 84 1987
 
MITSUBISHI DENKI KABUSHIKI KAISHA (1)
6875951 Laser machining device 55 2002
 
The United States of America as represented by the Secretary of the Navy (1)
5745284 Solid-state laser source of tunable narrow-bandwidth ultraviolet radiation 107 1996
 
SUMITOMO HEAVY INDUSTRIES, LTD. (2)
6580055 Laser processing apparatus and method 29 2001
6710289 Laser processing apparatus and method 13 2003
 
Grumman Aerospace Corporation (1)
5005946 Multi-channel filter system 44 1989
 
PANASONIC ELECTRIC WORKS CO., LTD. (1)
5494781 Method for manufacturing printed circuit board 44 1994
 
Arnold; Karl H. (1)
5925271 Laser beam shaping device and process including a rotating mirror 86 1996
 
MARGER JOHNSON & MCCOLLOM, P.C. (1)
6211485 Blind via laser drilling system 75 1998
 
WESTINGHOUSE ELECTRIC CORPORATION (1)
4492843 Apparatus and method for laser machining in a non-reactive environment 14 1982
 
MAUSER-WERKE GMBH (1)
5201437 Widemouth steel drum of conical shape 19 1992
 
SRI INTERNATIONAL (1)
5451785 Upconverting and time-gated two-dimensional infrared transillumination imaging 56 1994
 
RESEARCH FOUNDATION OF CITY COLLEGE OF NEW YORK, THE (1)
4932031 Chromium-doped foresterite laser system 34 1989
 
JMAR, LLC, A DELAWARE LIMITED LIABILITY COMPANY (2)
6472295 Method and apparatus for laser ablation of a target material 85 1999
6717101 Method and apparatus for laser ablation of a target material 27 2002
 
JMAR TECHNOLOGY CO. (3)
5539764 Laser generated X-ray source 36 1995
5742634 Picosecond laser 55 1996
5940418 Solid-state laser system for ultra-violet micro-lithography 49 1996
 
DEUTSCHE FORSCHUNGSANSTALT FUER LUFT- UND RAUMFAHRT E.V. (1)
5725914 Process and apparatus for producing a functional structure of a semiconductor component 39 1995
 
VIA MECHANICS, LTD. (1)
6849824 Multibeam laser drilling apparatus 38 2003
 
TIME-BANDWITH PRODUCTS AG (1)
5987049 Mode locked solid-state laser pumped by a non-diffraction-limited pumping source and method for generating pulsed laser radiation by pumping with a non-diffraction-limited pumping beam 39 1998
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (3)
4410237 Method and apparatus for shaping electromagnetic beams 65 1980
5513194 Stretched-pulse fiber laser 108 1995
6191486 Technique for producing interconnecting conductive links 20 1999
 
NEC CORPORATION (2)
5586138 Multiple-cavity semiconductor laser capable of generating ultrashort light pulse train with ultrahigh repetition rate 33 1995
6879605 Method and apparatus for performing pattern defect repair using Q-switched mode-locked pulse laser 24 2001
 
AT&T Bell Laboratories (2)
5021362 Laser link blowing in integrateed circuit fabrication 25 1989
5042040 Amplitude noise reduction for optically pumped modelocked lasers 19 1990
 
TPO HONG KONG HOLDING LIMITED (1)
6169014 Laser crystallization of thin films 96 1999
 
IMAR Technology Company (1)
5790574 Low cost, high average power, high brightness solid state laser 65 1997
 
NEOS TECHNOLOGIES, INC. (1)
5268911 X-cut crystal quartz acousto-optic modulator 24 1993
 
SUMMIT TECHNOLOGY, INC. (1)
4941093 Surface erosion using lasers 210 1986
 
KILOLAMBDA TECHNOLOGIES LTD. (1)
2007/0053,391 Laser pulse generator 11 2005
 
United Distillers PLC (1)
5653900 Dynamic laser marking 105 1993
 
COMERICA BANK (1)
4827325 Protective optical coating and method for use thereof 29 1987
 
IMRA AMERICA, INC. (8)
5400350 Method and apparatus for generating high energy ultrashort pulses 140 1994
5627848 Apparatus for producing femtosecond and picosecond pulses from modelocked fiber lasers cladding pumped with broad area diode laser arrays 133 1995
5701319 Method and apparatus for generating ultrashort pulses with adjustable repetition rates from passively modelocked fiber lasers 77 1995
5880877 Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier 156 1997
5818630 Single-mode amplifiers and compressors based on multi-mode fibers 246 1997
6072811 Integrated passively modelocked fiber lasers and method for constructing the same 111 1998
6034975 High power, passively modelocked fiber laser, and method of construction 80 1998
2005/0041,702 High energy optical fiber amplifier for picosecond-nanosecond pulses for advanced material processing applications 124 2004
 
TOPCAT INTERNATIONAL, INC. (1)
6103992 Multiple frequency processing to minimize manufacturing variability of high aspect ratio micro through-vias 121 1996
 
FUJITSU SEMICONDUCTOR LIMITED (1)
6297541 Semiconductor device and method for fabricating the same 29 1999
 
MICROELECTRONICS AND COMPUTER TECHNOLOGY CORPORATION (1)
5236551 Rework of polymeric dielectric electrical interconnect by laser photoablation 72 1992
 
GENERAL ELECTRIC COMPANY (1)
5953354 Laser resonator optical alignment 30 1998
 
THE REGENTS OF THE UNIVERSITY OF MICHIGAN (4)
5689519 Environmentally stable passively modelocked fiber laser pulse source 90 1993
5656186 Method for controlling configuration of laser induced breakdown and ablation 329 1994
5923686 Environmentally stable passively modelocked fiber laser pulse source 67 1997
RE37585 Method for controlling configuration of laser induced breakdown and ablation 122 1999
 
XRL, INC. (1)
4532402 Method and apparatus for positioning a focused beam on an integrated circuit 118 1983
 
NOVELLUS SYSTEMS, INC. (1)
5669979 Photoreactive surface processing 140 1996
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (1)
4914663 Generation of short high peak power pulses from an injection mode-locked Q-switched laser oscillator 31 1988
 
HITACHI VIA MECHANICS, LTD. (1)
6678061 Method of calibrating the optical system of a laser machine for processing electrical circuit substrates 10 2002
 
LUMENTUM OPERATIONS LLC (2)
5867305 Optical amplifier with high energy levels systems providing high peak powers 155 1996
6151338 High power laser optical amplifier system 91 1997
 
ANALOG DEVICES, INC. (1)
4399345 Laser trimming of circuit elements on semiconductive substrates 49 1981
 
HITACHI CONSTRUCTION MACHINERY CO., LTD. (2)
5632083 Lead frame fabricating method and lead frame fabricating apparatus 42 1995
5662822 Dam bar cutting apparatus and dam bar cutting method 30 1996
 
UNIVERSITY OF MARYLAND, BALTIMORE (1)
5956354 Dual media laser with mode locking 35 1996
 
EASTMAN KODAK COMPANY (2)
4397527 Apparatus for use in correcting beam anamorphicity by vector diffraction 22 1981
4878222 Diode laser with improved means for electrically modulating the emitted light beam intensity including turn-on and turn-off and electrically controlling the position of the emitted laser beam spot 17 1988
 
LAWRENCE LIVERMORE NATIONAL SECURITY, LLC (4)
5720894 Ultrashort pulse high repetition rate laser system for biological tissue processing 198 1996
6621040 Ultrashort pulse laser machining of metals and alloys 67 1997
6150630 Laser machining of explosives 146 1998
* 6268586 Method and apparatus for improving the quality and efficiency of ultrashort-pulse laser machining 34 1999
 
DATA STORAGE INSTITUTE (1)
6518540 Method and apparatus for providing ablation-free laser marking on hard disk media 15 1999
 
Y-Beam Technologies, Inc. (1)
6156030 Method and apparatus for high precision variable rate material removal and modification 160 1998
 
SPECTRA-PHYSICS (DELAWARE), INC., A CORP. OF DE (CHANGED TO) (1)
5059764 Diode-pumped, solid state laser-based workstation for precision materials processing and machining 55 1988
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
6441337 Laser machining method, laser machining device and control method of laser machining 22 1999
 
PRESIDENT AND FELLOWS OF HARVARD COLLEGE (1)
2002/0162,360 Method and apparatus for micromachining bulk transparent materials using localized heating by nonlinearly absorbed laser radiation, and devices fabricated thereby 22 2002
* Cited By Examiner

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Patent Info (Count) # Cites Year
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
* 2013/0200,053 LASER PROCESSING CONTROL METHOD 0 2011
* Cited By Examiner

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