US Patent No: 7,838,794

Number of patents in Portfolio can not be more than 2000

Laser-based method and system for removing one or more target link structures

Stats

ALSO PUBLISHED AS: 20070199927
ATTORNEY / AGENT: (SPONSORED)
 

Importance

Loading Importance Indicators... loading....

Abstract

Laser-based methods and systems for removing one or more target link structures of a circuit fabricated on a substrate includes generating a pulsed laser output at a predetermined wavelength less than an absorption edge of the substrate are provided. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target link structure to reduce the reflectivity of the target link structure and efficiently couple the focused laser output into the target link structure to remove the target link structure without damaging the substrate.

Loading the Abstract Image... loading....

First Claim

Related Publications

Loading Related Publications... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
ELECTRO SCIENTIFIC INDUSTRIES, INC.PORTLAND, OR387

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cordingley, James J Littleton, MA 45 679
Ehrmann, Jonathan S Sudbury, MA 80 967
Gu, Bo North Andover, MA 39 356
Johnson, Shepard D Andover, MA 44 452
Lee, Joohan Andover, MA 28 332
Smart, Donald V Boston, MA 63 1232
Svetkoff, Donald J Ann Arbor, MI 63 1335

Cited Art

Patent Info (Count) # Cites Year
 
ELECTRO SCIENTIFIC INDUSTRIES, INC. (65)
5,197,074 Multi-function intra-resonator loss modulator and method of operating same 51 1991
5,265,114 System and method for selectively laser processing a target structure of one or more materials of a multimaterial, multilayer device 70 1992
5,463,200 Marking of a workpiece by light energy 62 1993
5,521,628 Laser system for simultaneously marking multiple parts 25 1993
5,473,624 Laser system and method for selectively severing links 44 1994
5,569,398 Laser system and method for selectively trimming films 72 1994
5,685,995 Method for laser functional trimming of films and devices 42 1995
5,751,585 High speed, high accuracy multi-stage tool positioning system 100 1996
5,841,099 Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets 114 1996
5,837,962 Faster laser marker employing acousto-optic deflection 68 1996
5,847,960 Multi-tool positioning system 71 1996
5,998,759 Laser processing 83 1996
6,025,256 Laser based method and system for integrated circuit repair or reconfiguration 40 1997
6,057,180 Method of severing electrically conductive links with ultraviolet laser output 54 1998
6,339,604 Pulse control in laser systems 61 1998
6,181,728 Controlling laser polarization 62 1998
6,144,118 High-speed precision positioning apparatus 67 1998
6,300,590 Laser processing 35 1998
6,172,325 Laser processing power output stabilization apparatus and method employing processing position feedback 61 1999
6,341,029 Method and apparatus for shaping a laser-beam intensity profile by dithering 39 1999
6,281,471 Energy-efficient, laser-based method and system for processing target material 122 1999
6,462,306 System and method for material processing using multiple laser beams 44 2000
6,501,061 Laser calibration apparatus and method 35 2000
6,483,071 Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site 49 2000
6,433,301 Beam shaping and projection imaging with solid state UV Gaussian beam to form vias 55 2000
6,340,806 Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train 74 2000
6,574,250 Laser system and method for processing a memory link with a burst of laser pulses having ultrashort pulse widths 70 2001
6,495,791 Method and subsystem for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site 21 2001
6,662,063 Method and subsystem for determining a sequence in which microstructures are to be processed at a laser-processing site 32 2001
6,727,458 Energy-efficient, laser-based method and system for processing target material 62 2001
2002/0063,361 Laser processing of alumina or metals on or embedded therein 18 2001
6,573,473 Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site 23 2001
6,703,582 Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train 38 2002
2002/0167,581 Methods and systems for thermal-based laser processing a multi-material device 77 2002
6,639,177 Method and system for processing one or more microstructures of a multi-material device 24 2002
6,777,645 High-speed, precision, laser-based method and system for processing material of one or more targets within a field 30 2002
6,972,268 Methods and systems for processing a device, methods and systems for modeling same and the device 42 2002
7,027,155 Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure 23 2002
2003/0151,053 Processing a memory link with a set of at least two laser pulses 31 2002
6,951,995 Method and system for high-speed, precise micromachining an array of devices 36 2003
2003/0222,324 Laser systems for passivation or link processing with a set of laser pulses 18 2003
7,015,418 Method and system for calibrating a laser processing system and laser marking system utilizing same 46 2003
7,119,351 Method and system for machine vision-based feature detection and mark verification in a workpiece or wafer marking system 23 2003
2004/0188,399 Energy-efficient, laser-based method and system for processing target material 38 2004
6,989,508 High-speed, precision, laser-based method and system for processing material of one or more targets within a field 23 2004
7,126,746 Generating sets of tailored laser pulses 22 2004
2005/0279,739 Semiconductor structure processing using multiple laser beam spots spaced on-axis to increase single-blow throughput 20 2005
7,176,407 Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site 13 2005
7,192,846 Methods and systems for processing a device, methods and systems for modeling same and the device 14 2005
2006/0000,814 Laser-based method and system for processing targeted surface material and article produced thereby 16 2005
7,358,157 Method and system for high-speed precise laser trimming, scan lens system for use therein and electrical device produced thereby 9 2005
2006/0028,655 Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure 22 2005
2006/0108,337 Method and system for laser soft marking 10 2005
2006/0189,091 Method and system for laser hard marking 11 2005
2006/0086,702 Energy-efficient, laser-based method and system for processing target material 19 2005
7,148,447 Method and apparatus for laser marking by ablation 15 2006
2006/0199,354 Method and system for high-speed precise laser trimming and electrical device produced thereby 11 2006
2006/0205,121 Method and system for high-speed, precise micromachining an array of devices 19 2006
2007/0106,416 Method and system for adaptively controlling a laser-based material processing process and method and system for qualifying same 24 2006
2007/0215,820 Methods and systems for thermal-based laser processing a multi-material device 22 2006
2008/0094,640 Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method for controlling energy delivered to a target structure 25 2006
2007/0178,714 Method and system for high-speed precise laser trimming and scan lens for use therein 10 2007
2008/0073,438 Laser-based method and system for processing targeted surface material and article produced thereby 13 2007
2008/0035,614 ENERGY EFFICIENT, LASER-BASED METHOD AND SYSTEM FOR PROCESSING TARGET MATERIAL 13 2007
2008/0067,155 Method and system for laser processing targets of different types on a workpiece 13 2007
 
GSI LUMONICS CORPORATION (8)
5,300,756 Method for severing integrated-circuit connection paths by a phase-plate-adjusted laser beam 55 1991
2004/0144,760 Method and system for marking a workpiece such as a semiconductor wafer and laser marker for use therein 14 2003
2005/0199,598 Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site 15 2005
2006/0186,096 High speed, laser-based marking method and system for producing machine readable marks on workpieces and semiconductor devices with reduced subsurface damage produced thereby 14 2006
2006/0207,975 High-speed, precision, laser-based method and system for processing material of one or more targets within a field 20 2006
2006/0216,927 Methods and systems for processing a device, methods and systems for modeling same and the device 13 2006
2007/0031,993 Method and system for machine vision-based feature detection and mark verification in a workpiece or wafer marking system 13 2006
2007/0075,058 High-speed, precision, laser-based method and system for processing material of one or more targets within a field 13 2006
 
IMRA AMERICA, INC. (8)
5,400,350 Method and apparatus for generating high energy ultrashort pulses 92 1994
5,627,848 Apparatus for producing femtosecond and picosecond pulses from modelocked fiber lasers cladding pumped with broad area diode laser arrays 103 1995
5,701,319 Method and apparatus for generating ultrashort pulses with adjustable repetition rates from passively modelocked fiber lasers 48 1995
5,880,877 Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier 103 1997
5,818,630 Single-mode amplifiers and compressors based on multi-mode fibers 164 1997
6,072,811 Integrated passively modelocked fiber lasers and method for constructing the same 76 1998
6,034,975 High power, passively modelocked fiber laser, and method of construction 54 1998
2005/0041,702 High energy optical fiber amplifier for picosecond-nanosecond pulses for advanced material processing applications 60 2004
 
GSI GROUP CORPORATION (5)
2006/0151,704 Laser-based material processing methods, system and subsystem for use therein for precision energy control 14 2005
2006/0191,884 High-speed, precise, laser-based material processing method and system 19 2006
2007/0117,227 Method And System for Iteratively, Selectively Tuning A Parameter Of A Doped Workpiece Using A Pulsed Laser 11 2006
2007/0173,075 Laser-based method and system for processing a multi-material device having conductive link structures 12 2007
2007/0215,575 Method and system for high-speed, precise, laser-based modification of one or more electrical elements 11 2007
 
LAWRENCE LIVERMORE NATIONAL SECURITY, LLC (4)
5,720,894 Ultrashort pulse high repetition rate laser system for biological tissue processing 117 1996
6,621,040 Ultrashort pulse laser machining of metals and alloys 46 1997
6,150,630 Laser machining of explosives 114 1998
6,268,586 Method and apparatus for improving the quality and efficiency of ultrashort-pulse laser machining 29 1999
 
THE REGENTS OF THE UNIVERSITY OF MICHIGAN (4)
5,689,519 Environmentally stable passively modelocked fiber laser pulse source 63 1993
5,656,186 Method for controlling configuration of laser induced breakdown and ablation 177 1994
5,923,686 Environmentally stable passively modelocked fiber laser pulse source 46 1997
RE37585 Method for controlling configuration of laser induced breakdown and ablation 57 1999
 
JMAR TECHNOLOGY CO. (3)
5,539,764 Laser generated X-ray source 33 1995
5,742,634 Picosecond laser 48 1996
5,940,418 Solid-state laser system for ultra-violet micro-lithography 45 1996
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (3)
4,410,237 Method and apparatus for shaping electromagnetic beams 59 1980
5,513,194 Stretched-pulse fiber laser 91 1995
6,191,486 Technique for producing interconnecting conductive links 19 1999
 
AT&T Bell Laboratories (2)
5,021,362 Laser link blowing in integrateed circuit fabrication 24 1989
5,042,040 Amplitude noise reduction for optically pumped modelocked lasers 18 1990
 
E. I. DU PONT DE NEMOURS AND COMPANY (2)
5,293,025 Method for forming vias in multilayer circuits 86 1991
5,294,567 Method for forming via holes in multilayer circuits 43 1993
 
EASTMAN KODAK COMPANY (2)
4,397,527 Apparatus for use in correcting beam anamorphicity by vector diffraction 22 1981
4,878,222 Diode laser with improved means for electrically modulating the emitted light beam intensity including turn-on and turn-off and electrically controlling the position of the emitted laser beam spot 16 1988
 
GSI GROUP INC (2)
5,812,569 Stabilization of the output energy of a pulsed solid state laser 31 1997
5,854,805 Laser machining of a workpiece 31 1997
 
HITACHI CONSTRUCTION MACHINERY CO., LTD. (2)
5,632,083 Lead frame fabricating method and lead frame fabricating apparatus 39 1995
5,662,822 Dam bar cutting apparatus and dam bar cutting method 27 1996
 
HITACHI VIA MECHANICS, LTD. (2)
6,678,061 Method of calibrating the optical system of a laser machine for processing electrical circuit substrates 10 2002
6,849,824 Multibeam laser drilling apparatus 35 2003
 
Inmos Corporation (2)
4,826,785 Metallic fuse with optically absorptive layer 42 1987
4,935,801 Metallic fuse with optically absorptive layer 44 1989
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (2)
4,414,059 Far UV patterning of resist materials 135 1982
5,374,590 Fabrication and laser deletion of microfuses 48 1993
 
JDS UNIPHASE CORPORATION (2)
5,867,305 Optical amplifier with high energy levels systems providing high peak powers 94 1996
6,151,338 High power laser optical amplifier system 68 1997
 
JMAR, LLC, A DELAWARE LIMITED LIABILITY COMPANY (2)
6,472,295 Method and apparatus for laser ablation of a target material 56 1999
6,717,101 Method and apparatus for laser ablation of a target material 23 2002
 
LOCKHEED MARTIN CORPORATION (2)
4,780,177 Excimer laser patterning of a novel resist 103 1988
6,541,731 Use of multiple laser sources for rapid, flexible machining and production of vias in multi-layered substrates 68 2001
 
NEC CORPORATION (2)
5,586,138 Multiple-cavity semiconductor laser capable of generating ultrashort light pulse train with ultrahigh repetition rate 30 1995
6,879,605 Method and apparatus for performing pattern defect repair using Q-switched mode-locked pulse laser 22 2001
 
NIKON CORPORATION (2)
6,901,090 Exposure apparatus with laser device 32 2000
6,947,123 Exposure device with laser device 19 2000
 
SUMITOMO HEAVY INDUSTRIES, LTD. (2)
6,580,055 Laser processing apparatus and method 25 2001
6,710,289 Laser processing apparatus and method 12 2003
 
TERADYNE LASER SYSTEMS, INC., A MASSACHUSETTS CORP. (2)
4,483,005 Affecting laser beam pulse width 36 1981
4,918,284 Calibrating laser trimming apparatus 43 1988
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (2)
5,475,527 Fourier plane image amplifier 17 1994
6,421,166 Compact, flexible, frequency agile parametric wavelength converter 24 2000
 
Aisin Seiki Co., Ltd. (1)
6,208,458 Quasi-phase-matched parametric chirped pulse amplification systems 86 1998
 
AISIN SEIKI KABUSHIKI KAISHA (1)
5,920,668 Compact fiber laser unit 40 1997
 
AMO MANUFACTURING USA, LLC (1)
6,099,522 Automated laser workstation for high precision surgical and industrial interventions 130 1995
 
ANALOG DEVICES, INC. (1)
4,399,345 Laser trimming of circuit elements on semiconductive substrates 46 1981
 
Arnold; Karl H. (Ravensburg, DE) (1)
5,925,271 Laser beam shaping device and process including a rotating mirror 52 1996
 
CANON KABUSHIKI KAISHA (1)
5,739,590 Semiconductor device having improved surface evenness 18 1995
 
CHROMAPLEX, INC. (1)
2004/0057,475 High-power pulsed laser device 26 2002
 
Clark-MXR, Inc. (1)
5,592,327 Regenerative amplifier incorporating a spectral filter within the resonant cavity 91 1995
 
COMERICA BANK (1)
4,827,325 Protective optical coating and method for use thereof 28 1987
 
CORNELL RESEARCH FOUNDATION, INC. (1)
5,034,951 Femtosecond ultraviolet laser using ultra-thin beta barium borate 41 1990
 
COUNCIL FOR THE CENTRAL LABORATORY OF THE RESEARCH COUNCIL (1)
5,654,998 Laser-excited X-ray source 23 1995
 
DATA STORAGE INSTITUTE (1)
6,518,540 Method and apparatus for providing ablation-free laser marking on hard disk media 14 1999
 
DEUTSCHE FORSCHUNGSANSTALT FUR LUFT-UND RAUMFAHRT E.V. (1)
5,725,914 Process and apparatus for producing a functional structure of a semiconductor component 36 1995
 
EHRENWALD, JERRY (1)
4,467,172 Method and apparatus for laser engraving diamonds with permanent identification markings 64 1983
 
ETHICON, INC. (1)
6,252,195 Method of forming blind holes in surgical needles using a diode pumped Nd-YAG laser 28 1999
 
FUJITSU SEMICONDUCTOR LIMITED (1)
6,297,541 Semiconductor device and method for fabricating the same 27 1999
 
Gazelle Microcircuits, Inc. (1)
4,872,140 Laser programmable memory array 23 1987
 
GENERAL ATOMICS (1)
6,664,498 Method and apparatus for increasing the material removal rate in laser machining 43 2002
 
GENERAL ELECTRIC COMPANY (1)
5,953,354 Laser resonator optical alignment 28 1998
 
Grumman Aerospace Corporation (1)
5,005,946 Multi-channel filter system 40 1989
 
HITACHI, LTD. (1)
5,208,437 Method of cutting interconnection pattern with laser and apparatus thereof 61 1991
 
Imar Technology Co. (1)
5,790,574 Low cost, high average power, high brightness solid state laser 48 1997
 
KANEKA CORPORATION (1)
6,324,195 Laser processing of a thin film 41 1999
 
KILOLAMBDA TECHNOLOGIES LTD. (1)
2007/0053,391 Laser pulse generator 6 2005
 
LASERFRONT TECHNOLOGIES, INC. (1)
6,239,406 Laser beam machining apparatus 28 1999
 
MARGER JOHNSON & MCCOLLOM, P.C. (1)
6,211,485 Blind via laser drilling system 59 1998
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
6,441,337 Laser machining method, laser machining device and control method of laser machining 21 1999
 
Mauser-Werke GmbH (1)
5,201,437 Widemouth steel drum of conical shape 17 1992
 
McDonnell Douglas Corporation (1)
5,694,408 Fiber optic laser system and associated lasing method 87 1996
 
MICROELECTRONICS AND COMPUTER TECHNOLOGY CORPORATION (1)
5,236,551 Rework of polymeric dielectric electrical interconnect by laser photoablation 69 1992
 
Microline Technologies, Inc. (1)
5,759,428 Method of laser cutting a metal line on an MR head 37 1996
 
MITSUBISHI DENKI KABUSHIKI KAISHA (1)
6,875,951 Laser machining device 50 2002
 
MRF, INC. (1)
5,520,679 Ophthalmic surgery method using non-contact scanning laser 139 1994
 
NANYANG TECHNOLOGICAL UNIVERSITY (1)
6,285,002 Three dimensional micro machining with a modulated ultra-short laser pulse 71 1999
 
NEOS TECHNOLOGIES, INC. (1)
5,268,911 X-cut crystal quartz acousto-optic modulator 22 1993
 
New Wave Research (1)
5,811,751 Multi-wavelength laser system, probe station and laser cutter system using the same 135 1997
 
NORTHROP GRUMMAN CORPORATION (1)
4,742,522 Free-electron laser system with raman amplifier outcoupling 19 1987
 
NOVELLUS SYSTEMS, INC. (1)
5,669,979 Photoreactive surface processing 125 1996
 
ORBOTECH LTD. (1)
6,689,985 Laser drill for use in electrical circuit fabrication 19 2001
 
PANASONIC CORPORATION OF NORTH AMERICA (1)
5,786,560 3-dimensional micromachining with femtosecond laser pulses 87 1997
 
PANASONIC ELECTRIC WORKS CO., LTD. (1)
5,494,781 Method for manufacturing printed circuit board 39 1994
 
PRESIDENT AND FELLOWS OF HARVARD COLLEGE (1)
2002/0162,360 Method and apparatus for micromachining bulk transparent materials using localized heating by nonlinearly absorbed laser radiation, and devices fabricated thereby 16 2002
 
QUICK TECHNOLOGIES LTD. (1)
5,329,152 Ablative etch resistant coating for laser personalization of integrated circuits 44 1992
 
RAYTHEON COMPANY (1)
5,974,060 Multi-mode laser oscillator with large intermode spacing 53 1999
 
RESEARCH FOUNDATION OF CITY COLLEGE OF NEW YORK, THE (1)
4,932,031 Chromium-doped foresterite laser system 33 1989
 
SANDIA CORPORATION (1)
5,864,430 Gaussian beam profile shaping apparatus, method therefor and evaluation thereof 60 1996
 
SCIENCE & TECHNOLOGY DEVELOPMENT CORPORATION @ UNM (1)
5,175,664 Discharge of lightning with ultrashort laser pulses 39 1991
 
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. (1)
4,861,964 Laser scribing system and method 77 1987
 
SPECTRA-PHYSICS LASERS, INC. (1)
4,646,308 Synchronously pumped dye laser using ultrashort pump pulses 37 1985
 
SPECTRA-PHYSICS, INC. (1)
5,059,764 Diode-pumped, solid state laser-based workstation for precision materials processing and machining 53 1988
 
SRI INTERNATIONAL (1)
5,451,785 Upconverting and time-gated two-dimensional infrared transillumination imaging 51 1994
 
STC PLC (1)
4,602,852 Acousto-optic deflector systems 26 1984
 
Summit Technology, Inc. (1)
4,941,093 Surface erosion using lasers 183 1986
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (1)
4,914,663 Generation of short high peak power pulses from an injection mode-locked Q-switched laser oscillator 30 1988
 
The United States of America as represented by the Secretary of the Navy (1)
5,745,284 Solid-state laser source of tunable narrow-bandwidth ultraviolet radiation 64 1996
 
Time-Bandwith Products AG (1)
5,987,049 Mode locked solid-state laser pumped by a non-diffraction-limited pumping source and method for generating pulsed laser radiation by pumping with a non-diffraction-limited pumping beam 38 1998
 
Topcat International Inc. (1)
6,103,992 Multiple frequency processing to minimize manufacturing variability of high aspect ratio micro through-vias 112 1996
 
TPO HONG KONG HOLDING LIMITED (1)
6,169,014 Laser crystallization of thin films 68 1999
 
UNITED DISTILLERS PLC (1)
5,653,900 Dynamic laser marking 81 1993
 
UNIVERSITY OF CENTRAL FLORIDA RESEARCH FOUNDATION, INC. (1)
2005/0215,985 Method of generating an ultra-short pulse using a high-frequency ring oscillator 18 2005
 
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC. (1)
5,558,789 Method of applying a laser beam creating micro-scale surface structures prior to deposition of film for increased adhesion 37 1994
 
UNIVERSITY OF MARYLAND, BALTIMORE (1)
5,956,354 Dual media laser with mode locking 29 1996
 
Westinghouse Electric Corp. (1)
4,492,843 Apparatus and method for laser machining in a non-reactive environment 11 1982
 
XRL, INC. (1)
4,532,402 Method and apparatus for positioning a focused beam on an integrated circuit 112 1983
 
Y-Beam Technologies, Inc. (1)
6,156,030 Method and apparatus for high precision variable rate material removal and modification 100 1998
 
Other [Check patent profile for assignment information] (7)
5,280,491 Two dimensional scan amplifier laser 30 1991
5,524,018 Superior resolution laser using bessel transform optical filter 21 1994
5,848,080 Short pulsewidth high pulse repetition frequency laser 34 1997
6,210,401 Method of, and apparatus for, surgery of the cornea 100 1998
6,482,199 Method and apparatus for high precision variable rate material, removal and modification 54 2000
6,552,301 Burst-ultrafast laser machining method 58 2001
7,050,208 Scanning microscopy, fluorescence detection, and laser beam positioning 18 2002

Patent Citation Ranking

Forward Cites

  • No Forward Cites to Display

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 May 23, 2014
7.5 Year Payment $3600.00 $1800.00 $900.00 May 23, 2018
11.5 Year Payment $7400.00 $3700.00 $1850.00 May 23, 2022
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00