US Patent No: 7,839,557

Number of patents in Portfolio can not be more than 2000

Method and device for multistate interferometric light modulation

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ALSO PUBLISHED AS: 20080247028
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 269 4460
Cummings, William J Millbrae, CA 176 2671
Gally, Brian J Los Gatos, CA 111 1532

Cited Art

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (51)
6,040,937 Interferometric modulation 573 1996
6,674,562 Interferometric modulation of radiation 596 1998
6,055,090 Interferometric modulation 423 1999
7,123,216 Photonic MEMS and structures 482 1999
6,867,896 Interferometric modulation of radiation 364 2001
6,680,792 Interferometric modulation of radiation 457 2001
6,650,455 Photonic mems and structures 455 2001
2002/0075,555 Interferometric modulation of radiation 387 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 349 2002
6,710,908 Controlling micro-electro-mechanical cavities 307 2002
7,126,738 Visible spectrum modulator arrays 116 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 399 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 272 2002
6,912,022 Optical interference color display and optical interference modulator 227 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 93 2003
7,198,973 Method for fabricating an interference display unit 89 2003
2004/0209,195 Method for fabricating an interference display unit 209 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 188 2003
6,882,458 Structure of an optical interference display cell 228 2003
2004/0240,032 Interferometric modulation of radiation 290 2004
7,119,945 Altering temporal response of microelectromechanical elements 120 2004
6,958,847 Structure of an optical interference display unit 198 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 190 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 218 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 215 2004
6,952,303 Interferometric modulation pixels and manufacturing method thereof 187 2004
2005/0249,966 Method of manufacture for microelectromechanical devices 125 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 132 2004
2005/0195,462 Interference display plate and manufacturing method thereof 226 2004
7,006,272 Color changeable pixel 108 2004
2006/0007,517 Structure of a micro electro mechanical system 80 2004
7,372,613 Method and device for multistate interferometric light modulation 63 2005
2006/0065,940 Analog interferometric modulator device 72 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 53 2005
2006/0024,880 System and method for micro-electromechanical operation of an interferometric modulator 109 2005
7,236,284 Photonic MEMS and structures 82 2005
2006/0268,388 Movable micro-electromechanical device 50 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 74 2006
2006/0262,380 MEMS devices with stiction bumps 63 2006
7,554,711 MEMS devices with stiction bumps 30 2006
2007/0177,247 Method and device for modulating light with multiple electrodes 74 2007
2008/0013,145 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 44 2007
2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 81 2007
2008/0088,904 Method and device for modulating light with semiconductor substrate 81 2007
2008/0088,910 SYSTEM AND METHOD FOR A MEMS DEVICE 75 2007
2008/0088,911 SYSTEM AND METHOD FOR A MEMS DEVICE 78 2007
2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 81 2007
2008/0106,782 SYSTEM AND METHOD FOR A MEMS DEVICE 80 2007
2009/0068,781 METHOD OF MANUFACTURE FOR MICROELECTROMECHANICAL DEVICES 48 2008
2009/0080,060 SEPARABLE MODULATOR 49 2008
2010/0039,370 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 41 2009
 
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LUCENT TECHNOLOGIES INC. (7)
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SEIKO EPSON CORPORATION (5)
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6,452,712 Method of manufacturing spatial light modulator and electronic device employing it 82 2001
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FUJI PHOTO FILM CO., LTD. (3)
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SILICON LIGHT MACHINES CORPORATION (3)
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VENTURE LENDING & LEASING IV, INC. (3)
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HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (2)
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 257 2001
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SAMSUNG ELECTRONICS CO., LTD. (2)
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THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE (2)
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6,028,689 Multi-motion micromirror 242 1997
 
VAISALA OY (2)
5,561,523 Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis 112 1995
5,646,729 Single-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometer 113 1995
 
ADVANCED MICRO DEVICES, INC. (1)
6,335,235 Simplified method of patterning field dielectric regions in a semiconductor device 51 1999
 
AKZO N.V. (1)
5,381,232 Fabry-perot with device mirrors including a dielectric coating outside the resonant cavity 200 1993
 
CADILLAC RUBBER & PLASTICS, INC. (1)
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CANON KABUSHIKI KAISHA (1)
2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM 1998
 
DISCO CORPORATION (1)
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ECHELLE, INC. (1)
5,661,592 Method of making and an apparatus for a flat diffraction grating light valve 219 1995
 
HONEYWELL INC. (1)
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INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (1)
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INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
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INTPAX, INC. (1)
6,556,338 MEMS based variable optical attenuator (MBVOA) 67 2001
 
IRIDIGM DISPLAY CORPORATION (1)
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JDS UNIPHASE CORPORATION (1)
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JENOPTIK JENA G.M.B.H. (1)
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KODAK GRAPHIC COMMUNICATIONS CANADA COMPANY (1)
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LOCKHEED MARTIN CORPORATION (1)
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MASSACHUSETTS INSTITUTE OF TECHNOLOGY (1)
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MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
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MCDONNELL DOUGLAS CORPORATION (1)
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MEMS OPTICAL, INC. (1)
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MEMTRONICS, A DIVISION OF COGENT SOLUTIONS, INC. (1)
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MICRON TECHNOLOGY, INC. (1)
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NORTHROP CORPORATION (1)
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NUVOTRONICS, LLC (1)
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OPTRON SYSTEMS, INC. (1)
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POPKIN FAMILY ASSETS, L.L.C. (1)
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QUALCOMM INCORPORATED (1)
2004/0175,577 Structure of a light-incidence electrode of an optical interference display plate 195 2003
 
QUANTUM DIAGNOSTICS LTD. (1)
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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
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THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (1)
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THOMSON-CSF (1)
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OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (5)
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5,062,689 Electrostatically actuatable light modulating device 143 1990
5,315,370 Interferometric modulator for optical signal processing 120 1991
6,862,127 High performance micromirror arrays and methods of manufacturing the same 46 2003
2006/0220,160 Structure of a structure release and a method for manufacturing the same 71 2005

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (5)
8,358,266 Light turning device with prismatic light turning features 0 2009
8,081,373 Devices and methods for enhancing color shift of interferometric modulators 0 2010
8,213,075 Method and device for multistate interferometric light modulation 0 2010
8,098,417 Electromechanical system having a dielectric movable membrane 0 2011
8,368,997 Electromechanical device with optical function separated from mechanical and electrical function 0 2011

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