Micromirror device with a single address electrode
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United States of America Patent
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Nov 23, 2010
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N/A
app pub date -
Feb 25, 2008
filing date -
Feb 26, 2007
priority date (Note) -
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Abstract
A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable in a plurality of directions, an address electrode composed of first and second regions that are arranged across the deflection axis of each mirror, and a driving circuit for controlling the mirror to deflect in the directions of the first and the second regions.
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