Vacuum jacket for phase change memory element
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United States of America Patent
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Nov 30, 2010
Grant Date -
Jan 22, 2009
app pub date -
Aug 27, 2008
filing date -
Nov 21, 2005
priority date (Note) -
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Abstract
A memory device including a phase change element and a vacuum jacket. The device includes a first electrode element; a phase change element in contact with the first electrode element; an upper electrode element in contact with the phase change element; a bit line electrode in contact with the upper electrode element; and a dielectric fill layer surrounding the phase change element and the upper electrode element, spaced from the same and sealed by the bit line electrode to define a vacuum jacket around the phase change element and upper electrode element.
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