
US Patent No: 7,846,344
Number of patents in Portfolio can not be more than 2000
Method and device for modulating light
Stats
-
Dec 7, 2010
Issued date -
Jan 30, 2007
filing date -
11/668,973
serial no -
In Force
status
Importance
Abstract
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.
First Claim
Related Publications
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
|
|
|||
| 4,441,791 Deformable mirror light modulator | 588 | 1982 | |
| 4,482,213 Perimeter seal reinforcement holes for plastic LCDs | 208 | 1982 | |
| 4,571,603 Deformable mirror electrostatic printer | 348 | 1984 | |
| 4,566,935 Spatial light modulator and method | 477 | 1984 | |
| 5,018,256 Architecture and process for integrating DMD with control circuit substrates | 291 | 1990 | |
| 5,142,405 Bistable DMD addressing circuit and method | 321 | 1990 | |
| 5,061,049 Spatial light modulator and method | 703 | 1990 | |
| 5,099,353 Architecture and process for integrating DMD with control circuit substrates | 305 | 1991 | |
| 5,226,099 Digital micromirror shutter device | 350 | 1991 | |
| 5,216,537 Architecture and process for integrating DMD with control circuit substrates | 364 | 1992 | |
| 5,212,582 Electrostatically controlled beam steering device and method | 336 | 1992 | |
| 5,818,095 High-yield spatial light modulator with light blocking layer | 287 | 1992 | |
| 5,285,196 Bistable DMD addressing method | 110 | 1992 | |
| 5,452,138 Deformable mirror device with integral color filter | 131 | 1993 | |
| 5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same | 381 | 1993 | |
| 5,602,671 Low surface energy passivation layer for micromechanical devices | 265 | 1994 | |
| 5,606,441 Multiple phase light modulation using binary addressing | 210 | 1994 | |
| 5,444,566 Optimized electronic operation of digital micromirror devices | 345 | 1994 | |
| 5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices | 284 | 1994 | |
| 5,526,688 Digital flexure beam accelerometer and method | 198 | 1994 | |
| 5,650,881 Support post architecture for micromechanical devices | 250 | 1994 | |
| 5,567,334 Method for creating a digital micromirror device using an aluminum hard mask | 230 | 1995 | |
| 5,597,736 High-yield spatial light modulator with light blocking layer | 233 | 1995 | |
|
|
|||
| 4,190,488 Etching method using noble gas halides | 70 | 1978 | |
| 4,560,435 Composite back-etch/lift-off stencil for proximity effect minimization | 104 | 1984 | |
| 5,326,430 Cooling microfan arrangements and process | 134 | 1993 | |
|
|
|||
| 4,672,254 Surface acoustic wave devices and method of manufacture thereof | 80 | 1985 | |
| 5,784,189 Spatial light modulator | 240 | 1995 | |
| 5,959,763 Spatial light modulator | 219 | 1998 | |
|
|
|||
| 5,835,255 Visible spectrum modulator arrays | 458 | 1994 | |
| 6,040,937 Interferometric modulation | 571 | 1996 | |
| 5,986,796 Visible spectrum modulator arrays | 444 | 1996 | |
|
|
|||
| 4,403,248 Display device with deformable reflective medium | 322 | 1981 | |
| 4,459,182 Method of manufacturing a display device | 232 | 1983 | |
| 4,965,562 Electroscopic display device | 126 | 1988 | |
|
|
|||
| 2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM | 1998 | ||
| 2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM | 1998 | ||
|
|
|||
| 4,377,324 Graded index Fabry-Perot optical filter device | 225 | 1980 | |
| 5,559,358 Opto-electro-mechanical device or filter, process for making, and sensors made therefrom | 343 | 1994 | |
|
|
|||
| 4,857,978 Solid state light modulator incorporating metallized gel and method of metallization | 90 | 1987 | |
| 4,900,136 Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel | 140 | 1988 | |
|
|
|||
| 5,355,181 Apparatus for direct display of an image on the retina of the eye using a scanning laser | 89 | 1991 | |
| 5,422,310 Method of forming interconnection in semiconductor device | 52 | 1994 | |
|
|
|||
| 4,896,033 Array of optically-controlled elements for the diffusion of electromagnetic energy | 32 | 1989 | |
| 5,961,848 Process for producing magnetoresistive transducers | 67 | 1996 | |
|
|
|||
| 5,381,232 Fabry-perot with device mirrors including a dielectric coating outside the resonant cavity | 200 | 1993 | |
|
|
|||
| 5,500,761 Micromechanical modulator | 324 | 1994 | |
|
|
|||
| 5,078,479 Light modulation device with matrix addressing | 267 | 1991 | |
|
|
|||
| 5,206,632 Actuating circuit for a liquid crystal display | 33 | 1990 | |
|
|
|||
| 4,880,493 Electronic-carrier-controlled photochemical etching process in semiconductor device fabrication | 55 | 1988 | |
|
|
|||
| 4,863,245 Superlattice electrooptic devices | 40 | 1988 | |
|
|
|||
| 5,454,904 Micromachining methods for making micromechanical moving structures including multiple contact switching system | 107 | 1994 | |
|
|
|||
| 5,401,983 Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices | 250 | 1993 | |
|
|
|||
| 4,952,034 Liquid crystal projection display | 23 | 1989 | |
|
|
|||
| 4,392,711 Process and apparatus for rendering visible charge images | 119 | 1981 | |
|
|
|||
| 4,425,572 Thin film transistor | 49 | 1981 | |
|
|
|||
| 5,737,050 Light valve having reduced reflected light, high brightness and high contrast | 41 | 1996 | |
|
|
|||
| 5,114,226 3-Dimensional vision system utilizing coherent optical detection | 70 | 1990 | |
|
|
|||
| 5,619,059 Color deformable mirror device having optical thin film interference color coatings | 219 | 1994 | |
|
|
|||
| 5,638,084 Lighting-independent color video display | 205 | 1996 | |
|
|
|||
| 5,170,283 Silicon spatial light modulator | 153 | 1991 | |
|
|
|||
| 5,218,472 Optical interference structures incorporating porous films | 52 | 1992 | |
|
|
|||
| 5,337,191 Broad band pass filter including metal layers and dielectric layers of alternating refractive index | 83 | 1993 | |
|
|
|||
| 5,198,644 System for display of prices and related method | 198 | 1992 | |
|
|
|||
| 4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction | 274 | 1986 | |
|
|
|||
| 5,699,181 Deformable mirror device and manufacturing method thereof | 58 | 1996 | |
|
|
|||
| 5,293,272 High finesse holographic fabry-perot etalon and method of fabricating | 175 | 1992 | |
|
|
|||
| 4,859,060 Variable interferometric device and a process for the production of the same | 361 | 1986 | |
|
|
|||
| 4,925,259 Multilayer optical dielectric coating | 84 | 1988 | |
|
|
|||
| 4,655,554 Spatial light modulator having a capacitively coupled photoconductor | 84 | 1985 | |
|
|
|||
| 5,312,512 Global planarization using SOG and CMP | 135 | 1992 | |
|
|
|||
| 5,457,900 Footwear display device | 86 | 1994 | |
|
|
|||
| 5,142,414 Electrically actuatable temporal tristimulus-color device | 255 | 1991 | |
| 5,315,370 Interferometric modulator for optical signal processing | 120 | 1991 | |
| 5,488,505 Enhanced electrostatic shutter mosaic modulator | 70 | 1992 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Jun 7, 2014 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jun 7, 2018 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 7, 2022 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |