Multilayer film with stack of nanometer-scale thicknesses

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Dec 7, 2010
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Apr 16, 2008
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Feb 28, 2005

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Abstract

This disclosure describes system(s) and/or method(s) enabling contacts for individual nanometer-scale-thickness layers of a multilayer film.

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SAMSUNG ELECTRONICS CO., LTD.

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Kornilovich, Paval	Corvallis, US	1	0
Mardilovich, Peter	Corvallis, US	149	4975
Ramamoorthi, Sriram	Corvallis, US	39	204

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Multilayer film with stack of nanometer-scale thicknesses

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United States of America Patent

12104252

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DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
December 07, 2010	US,7847368,B2 US7847368B2	GRANTED PATENT AS SECOND PUBLICATION
May 21, 2009	US,20090126977,A1 US20090126977A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7847368
SERIAL NO	12104252
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12104252

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