Semiconductor test system with self-inspection of electrical channel for Pogo tower
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United States of America Patent
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Dec 7, 2010
Grant Date -
Aug 12, 2010
app pub date -
Jul 13, 2009
filing date -
Feb 11, 2009
priority date (Note) -
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Abstract
A semiconductor test system with self-inspection of an electrical channel for a Pogo tower is disclosed, which provides a short board and closed loops are formed respectively by providing various kinds of contacts to correspondingly electrically contact various kinds of Pogo pins in the Pogo tower on a load board. A self-inspection controller outputs different inspection signals, through the above-mentioned closed loops, respectively to each power channel, each I/O channel and each drive channel, and a plurality of parameter detection units detect response signals, and the response signals are judged by the self-inspection controller. Based on it, before inspecting a wafer to be tested, the invention is capable of self-inspecting each electrical channel and each Pogo pin on the Pogo tower to see if they are respectively in a normal condition, either in an open or short circuit, or if there exists a leakage condition.
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