Microneedle structure and production method therefor
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United States of America Patent
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Dec 14, 2010
Issued Date -
N/A
app pub date -
Jan 4, 2010
filing date -
Aug 28, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A method for processing a wafer to form a plurality of hollow microneedles projecting from a substrate includes forming, by use of a dry etching process, a number of groups of recessed features, each including at least one slot deployed to form an open shape having an included area and at least one hole located within the included area. The internal surfaces of the holes and the slots are then coated with a protective layer. An anisotropic wet etching process is then performed in such a manner as to remove material from outside the included areas while leaving a projecting feature within each of the included areas. The protective layer is then removed to reveal the microneedles.
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