Method of improving corrosion resistance of stainless steel surfaces by a process of passivation
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United States of America Patent
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Dec 14, 2010
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Oct 17, 2006
filing date -
Dec 20, 2002
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Abstract
Described is a space-conserving integrated fluid delivery system particularly useful for gas distribution in semiconductor processing equipment. The system includes integrated fluid flow network architecture, and may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded. Subsequent to diffusion bonding, a stainless steel diffusion bonded part may advantageously be treated to enhance corrosion resistance using a series of steps designed to bring more chromium to the surface of the steel.
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