Composition for removing an insulation material, method of removing an insulation layer and method of recycling a substrate using the same
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United States of America Patent
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Dec 14, 2010
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N/A
app pub date -
Oct 2, 2006
filing date -
Oct 17, 2005
priority date (Note) -
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Abstract
In one aspect, a composition is provided which is capable of removing an insulation material which includes at least one of a low-k material and a passivation material. The composition of this aspect includes about 5 to about 40 percent by weight of a fluorine compound, about 0.01 to about 20 percent by weight of a first oxidizing agent, about 10 to about 50 percent by weight of a second oxidizing agent, and a remaining water.
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