Microscope automatic focusing device and method thereof

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United States of America Patent

PATENT NO 7851735
SERIAL NO

11863783

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Abstract

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An auto focus device and method are provided. The device comprises a beam splitter set; a laser emitting device disposed at a first side of the beam splitter set for providing a laser beam to the beam splitter; a lens set disposed at a second side of the beam splitter set and opposing to the testing subject positioned at a third side of the beam splitter set for refracting a reflected beam from a testing subject for generating a light spot; and a photo detecting device disposed with respect to the lens set for receiving the light spot and generating a driving signal.

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Patent Owner(s)

Patent OwnerAddress
TECHNOLOGY RESEARCH CENTER NATIONAL APPLIED RESEARCH LABORATORIESNO 20 R&D RD VI HSINCHU SCIENCE PARK HSINCHU 300

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chien-Jen Hsinchu, TW 29 397
Chen, Fong-Zhi Hsinchu, TW 8 16
Chen, Nien-Tsu Hsinchu, TW 8 11
Chen, Po-Jui Hsinchu, TW 73 1017
Ho, Cheng-Fang Hsinchu, TW 6 5
Hsu, Wei-Yao Hsinchu, TW 7 6
Lee, Chien-Shing Hsinchu, TW 4 16
Su, Fang-Hsuan Hsinchu, TW 16 46

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