Separable modulator
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United States of America Patent
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Dec 14, 2010
Grant Date -
Aug 26, 2010
app pub date -
Mar 1, 2010
filing date -
Dec 19, 1996
priority date (Note) -
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status (Latency Note)
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Abstract
A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.
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